Skip to main content
SpringerLink
Log in

Thermodynamics and Microstructure Development in the Thin Film Reaction of Aluminum on Silicon Carbide

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

A refined thermodynamic analysis of the reaction between molten Al and SiC is presented. The calculations indicate much higher Si concentrations for saturation with respect to Al4C3 formation than previously reported. Preliminary rnicrostructural studies confirm the formation of interfacial Al4C3 for pure Al thin films on SiC reacted at 900°C. The implications of the calculations and experimental observations for the production of ohmic contacts to p-type SiC are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. R.F. Davis, G. Keiner, M. Shur, J.W. Palmour, J.A. Edmond, Trans. IEEE 79, 677 (1991).

    CAS  Google Scholar 

  2. J.C. Viala, P. Fortier, J. Bouix, J. Mater. Sci. 25, 1842 (1990).

    Article  CAS  Google Scholar 

  3. D. J. Lloyd, H. Lagace, A. McLeod, P. L. Morris, Mater. Sci. Eng. A107,73 (1989).

    Article  CAS  Google Scholar 

  4. T. Iseki, T. Kameda, T. Maruyama, J. Mater. Sci. 19, 1692 (1984).

    Article  CAS  Google Scholar 

  5. A. S. Isaikin, V. M. Chubarov, B. F. Trefilov, V. A. Silaev, Yu. A. Gorelov, Metallovedenie i Termicheskaya Obrabotka Metallov 11, 32 (1980).

    Google Scholar 

  6. H. Nakae, K. Yamaota, K. Sato, Mat. Trans, JIM 32, 531 (1991).

    Article  CAS  Google Scholar 

  7. O. Kubaschewski, C. B. Alcock, Metallurgical Thermochemistry, Pergamon (1985), p. 327.

    Google Scholar 

  8. J. L. Murray, A. J. McAlister, Bull. Alloy Phase Diagrams 5, 74–84 (1984).

    Article  CAS  Google Scholar 

  9. A. C. Ferro, B. Derby, Acta Metall. Mater. 43, 3061 (1995).

    Article  CAS  Google Scholar 

  10. C. A. Handwerker, M. D. Vaudin, U. R. Kattner, D. Lee in Metal-Ceramic Interfaces, edited by M. Rühle and A. G. Evans (Pergamon Press, New York, 1990), p. 129.

  11. Z. Kozuka, S. Yasugi, W. Nakajima, and J. Moriyama, Denkikagaku, 34, 35 (1966).

    CAS  Google Scholar 

Download references

Acknowledgments

The authors thank Alexei Vassiliev for preparing the TEM samples referenced in this work. Funding for this project was provided through the NSF Research Experience for Undergraduates Program at Purdue University and by IBM Grant No. 6712178.

Author information

Authors and Affiliations

  1. School of Materials Engineering, Purdue University, W. Lafayette, IN, 47907, USA

    T.S. Hayes, F.T. Ray, K.P. Trumble & E.P. Kvam

Authors
  1. T.S. Hayes
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. F.T. Ray
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. K.P. Trumble
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. E.P. Kvam
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Hayes, T., Ray, F., Trumble, K. et al. Thermodynamics and Microstructure Development in the Thin Film Reaction of Aluminum on Silicon Carbide. MRS Online Proceedings Library 403, 489–494 (1995). https://doi.org/10.1557/PROC-403-489

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-403-489

Search

Navigation