Abstract
Zinc oxide thin films doped with zirconium were prepared from solutions with doping material dispersed at several concentrations and using the spray pyrolysis technique.The films were deposited over sodocalcic glasses at different substrate temperatures. Effects of doping material concentration and substrate temperatures on electrical, optical, structural and morphological film properties are presented. Results show an evolution in morphology and grains size as the doping concentration is increased. Preferential growth in the (002) orientation was detected for each thin film from X ray diffractograms.
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L. Chopra, S. Major, D.K. Pandya; Thin Solid Films, 102,(1983), 1–46
H. Jacobs, W. Mokwa, D. Kohl, G. Heiland; Surface Science, 126,(1983), 368–373
G. Carlotti, G. Socino, A. petri, E. Verona; App.Phys.Lett. 51,(1987), 1889–1891
A. Ortiz, A. Sánchez, C. Falcony, L. Cota; J.of Non-Crystalline. Solids, 103,(1988), 9–13
Y. Qu, T. Gessert, L. Kramanathan, T. Couts; J. Vac.Sci. and Tech., 11,(1993), 996–100
Jin Ma, Feng Ji, Hong-lei Mashu-ying Li; Thin Solid Films, 279,(1996), 213–215
F.T.J. Smith; Appl. Phys.Letts.; 43,(1983) 1108–1115
Malle Krunks, Enn Mellikov; Thin Solid Films, 283, (1997), 134–139
W. Wang, D.C. Cameron; Thin Solid Films, 280, (1996), 221–226
G.L. Messing, Shi-chang, G.V. Jayanthi; J.Amer.Cer.Soc. 76,(1993), 2707–2726
H. Gömez, A. Maldonado, R. Asomoza, E.P. Zironi, J. Ca~netas-Ortega, J. Palacios, Thin Solid Films 293 293,(1997), 117–123
A. Tiburcio Silver, Ms Sc. Thesis, Electrical Engineering Depattament, CINVESTAV, Instituto Politécnico Nacional, México. D.F., (1985).
M.G. Ambia, M.N. Islam, M. Obaidul Hakim; J. Mat. Sci. 28, (1993), 2659–2663
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Maldonado, A., Acosta, D.R., De La Luz Olvera, M. et al. Physical Characterization of Zirconium Doped Zinc Oxide Thin Firms Deposited by Spray Pyrolysis. MRS Online Proceedings Library 520, 57–62 (1998). https://doi.org/10.1557/PROC-520-57
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DOI: https://doi.org/10.1557/PROC-520-57