Abstract
Excimer laser induced rapid formation of nitride and oxide layers on beryllium samples immersed in liquid nitrogen and water, resp., has been studied. From Rutherford backscattering spectra the amounts of incorporated nitrogen and oxygen were determined. In addition, scanning electron microscopy was used to study the morphology of the irradiated surface and compound formation was confirmed by X-ray diffraction. Our results show that extremely rapid reaction takes place when the laser energy is sufficient to melt the beryllium surface. The amount of reaction is found to be proportional to both the energy density and the number of laser shots, until a nearly stoichiometric layer of Be3N2 or BeO is formed at the surface, at which point the reaction saturates. Growth rates on the order 20 nm per shot are deduced from the data, which is orders of magnitude higher than those achieved by conventional means.
Similar content being viewed by others
References
Pulsed Laser Processing of Semiconductors, edited by R. F. Wood, C. W. White and R. T. Young (Academic Press, New York, 1984).
R. Kelly, J. J. Cuomo, P. A. Leary, J. E. Rothenberg, B. A. Braren and C. F. Aliotta, Nucl. Instr. and Meth. in Phys. Res. B9, 329 (1985).
E. Sutcliffe and R. Srinivasan, J. Appl. Phys. 60, 3315 (1986).
Laser-Controlled Chemical Processing of Surfaces, Mat. Res. Soc. Symp. Proc. 29, edited by A. Wayne Johnson, D. J. Ehrlich and H. R. Schlossberg.
T. Baller, O. J. Oostra, A. E. de Vries and G. N. A. van Veen, J. Appl. Phys. 60, 2321 (1986).
K. Nakamura, M. Hikita, H. Asano and A. Terada, Appl. Phys. Lett. 21, 672 (1982).
W. K. Wang and F. Spaepen, Appl. Phys. Lett. 49, 295(1986).
I. Ursu, I. N. Mihailescu, L. Nanu, L. C. Nistor, M. Popescu, V. S. Teodorescu, A. M. Prokhorov, V. I. Konov, S. A. Uglovand V. G. Ralchenko, J. Phys. D: Appl. Phys. 19, 1183 (1986).
Siu-Wai Chan, D. Dijkkamp, X. D. Wu, T. Venkatesan and C. C. Chang, Mat. Res. Soc. Proc. 74 (North Hol land, 1987) to be published.
L. R. Doolittle, Nucl. Instr. and Meth. in Phys. Res. B9, 344 (1985).
Joint Committee for Powder Diffraction Spectra: Be3N2 cubic file-nr. 4-0786, BeO hexa. file-nr. 4-0843, Be hexa. file-nr. 1-1291.
G. B. Sabine, Phys. Rev. 55, 1064 (1939).
J. H. Weaver, D. W. Lynch and R. Rosei, Phys. Rev. B 7, 3537 (1973).
Thermodynamical Properties of Matter, The TPRC data series, edited by Y.S. Touloukian and C.Y. Ho (IFI Plenum, New York, 1970).
D. H. Auston, G. A. Golovchenko, A. L. Simons, C. M. Surko and T. Venkatesan, Appl. Phys. Lett. 34, 777 (1979).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Dijkkamp, D., Wu, X.D., Chan, SW. et al. Rapid Formation of Beryllium Nitride and Beryllium Oxide by Excimer Laser Irradiation of Samples Immersed in Liquids. MRS Online Proceedings Library 75, 303–308 (1986). https://doi.org/10.1557/PROC-75-303
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-75-303