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Femtosecond laser direct writing in transparent materials based on nonlinear absorption

  • Ultrafast Laser Synthesis and Processing of Materials
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Abstract

Femtosecond laser direct writing (FsLDW) in transparent materials is a laser-based precise three-dimensional (3D) micro/nanofabrication method that has shown great potential for applications. The advantages of FsLDW originate in the nonlinear nature of absorption in the multiphoton absorption process. Over the past few years, transparent material micro/nanofabrication using FsLDW has seen several developments in materials and applications. Specifically, two-photon polymerization has been widely used as a precision direct-writing process for fabrication of polymeric 3D micro/nanostructures; internal/surface ablation of polymer 3D structures based on multiphoton absorption has been demonstrated and developed as a promising subtractive manufacturing technique; and femtosecond laser multiphoton modification in glass has been intensively studied for refractive-index change and generation of nanogratings and microvoids. This article describes the latest research on FsLDW in polymers and glasses with specific applications for large-dimension fabrication, microelectromechanical systems, microphotonics, and microfluidics.

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Acknowledgements

The authors at the University of Nebraska–Lincoln would like to acknowledge financial support from the National Science Foundation (CMMI 1265122), Schafer Corporation, and Nebraska Center for Energy Sciences Research. R.O. acknowledges financial support from the European Union’s Horizon 2020 Research and Innovation Program under Grant No. 688510.

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Authors and Affiliations

  1. Department of Electrical and Computer Engineering, University of Nebraska–Lincoln, USA

    Li Jia Jiang

  2. Department of Mechanical Engineering and Materials Science, Graduate School of Engineering, Yokohama National University, Japan

    Shoji Maruo

  3. Institute for Photonics and Nanotechnologies, Italian National Research Council; and Department of Physics, Polytechnic University of Milan, Italy

    Roberto Osellame

  4. Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, China

    Wei Xiong

  5. Material Science Solutions, Inc., USA

    John H. Campbell

  6. Department of Electrical and Computer Engineering, University of Nebraska–Lincoln, USA

    Yong Feng Lu

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Jiang, L.J., Maruo, S., Osellame, R. et al. Femtosecond laser direct writing in transparent materials based on nonlinear absorption. MRS Bulletin 41, 975–983 (2016). https://doi.org/10.1557/mrs.2016.272

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