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Epitaxial Growth of Ferroelectric Pb(Zr,Ti)O3 Layers on GaAs

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Ferroelectric epitaxial Pb(Zr,Ti)O3 (PZT) layers were grown by pulsed laser deposition on SrTiO3/GaAs templates fabricated by molecular beam epitaxy. The templates present an excellent structural quality and the SrTiO3/GaAs is abrupt at the atomic scale thanks to surface Ti pre-treatment. The PZT layers contain a- and c- domains, as shown by X-Ray diffraction analyses. Piezoforce microscopy experiments and macroscopic electrical characterizations indicate that PZT is ferroelectric. A relative dielectric permittivity of 164 is extracted from these measurements.

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Authors and Affiliations

  1. Ecole Centrale de Lyon, INL-CNRS, Ecully, France

    Benjamin Meunier, Lucie Mazet, Romain Bachelet, Philippe Regreny, Claude Botella, Geneviève Grenet, Catherine Dubourdieu & Guillaume Saint-Girons

  2. RIBER SA, Bezons, France

    Lamis Louahadj

  3. Institut d’Electronique Fondamentale, Université Paris-Sud, Orsay, France

    David Le Bourdais, Guillaume Agnus, Philippe Lecoeur & Valérie Pillard

  4. LPN-CNRS, Marcoussis, France

    Ludovic Largeau

  5. NSA, INL-CNRS, Villeurbanne, France

    David Albertini & Brice Gautier

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  1. Benjamin Meunier
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  2. Lamis Louahadj
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  3. David Le Bourdais
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  6. Philippe Lecoeur
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  7. Valérie Pillard
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  8. Lucie Mazet
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  9. Romain Bachelet
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  10. Philippe Regreny
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  11. Claude Botella
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  12. Geneviève Grenet
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  13. David Albertini
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  14. Catherine Dubourdieu
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  15. Brice Gautier
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Meunier, B., Louahadj, L., Le Bourdais, D. et al. Epitaxial Growth of Ferroelectric Pb(Zr,Ti)O3 Layers on GaAs. MRS Online Proceedings Library 1675, 93–98 (2014). https://doi.org/10.1557/opl.2014.786

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  • DOI: https://doi.org/10.1557/opl.2014.786

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