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Increasing the Interferogram Sensitivity by Digital Holography

  • MODELING IN PHYSICAL AND TECHNICAL RESEARCH
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Optoelectronics, Instrumentation and Data Processing Aims and scope

Abstract

This paper presents the results of experimental studies and digital methods for recording of holograms using spatial light modulators. The use of holographic interference methods for measuring nanoscale irregularities is described for the case of a nanostep (70 nm in height and 30 \(\mu\)m in width). Examples are given of the method of increased sensitivity for nanostep measurements and the method of hooks using a digital technique. Correction of internal system distortions in the interferometer has been shown to be a workable method. The holographic interference methods with digital processing of holograms allows the sensitivity of interferograms to be increased without loss of basic information about the object and without increasing the measurement accuracy.

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Funding

This work was supported by the Ministry of Science and Higher Education of the Russian Federation within the state target ‘‘Scientific research (basic research, applications, and experimental developments),’’ project no. 8.6743.2017/8.9.

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Authors and Affiliations

  1. ITMO University, 197101, St. Petersburg, Russia

    N. S. Balbekin, D. V. Venediktov, N. V. Petrov & V. I. Shoev

  2. St. Petersburg Electrotechnical University LETI, 197376, St. Petersburg, Russia

    V. Yu. Venediktov, R. S. Konovalov, A. A. Sevryugin & I. Tursunov

  3. St. Petersburg University, 199034, St. Petersburg, Russia

    V. Yu. Venediktov & S. A. Pul’kin

Authors
  1. N. S. Balbekin
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  2. V. Yu. Venediktov
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  3. D. V. Venediktov
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  4. N. V. Petrov
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  5. R. S. Konovalov
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  6. S. A. Pul’kin
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  7. A. A. Sevryugin
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  8. I. Tursunov
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  9. V. I. Shoev
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Corresponding author

Correspondence to V. Yu. Venediktov.

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Balbekin, N.S., Venediktov, V.Y., Venediktov, D.V. et al. Increasing the Interferogram Sensitivity by Digital Holography. Optoelectron.Instrument.Proc. 56, 190–197 (2020). https://doi.org/10.3103/S8756699020020028

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  • DOI: https://doi.org/10.3103/S8756699020020028

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