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Nanofabrication

Principles and Applications

  • Book
  • © 2016

Overview

Authors:
  1. Christo Papadopoulos

    1. Victoria, Canada

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Part of the book series: SpringerBriefs in Materials (BRIEFSMATERIALS)

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Table of contents (8 chapters)

  1. Front Matter

    Pages i-vi
    Download chapter PDF

  2. Introduction

    • Christo Papadopoulos
    Pages 1-5

  3. Silicon Planar Processing and Photolithography

    • Christo Papadopoulos
    Pages 7-14

  4. Direct-Write Lithography Approaches

    • Christo Papadopoulos
    Pages 15-21

  5. Stamping Methods

    • Christo Papadopoulos
    Pages 23-28

  6. Scanning-Probe Methods

    • Christo Papadopoulos
    Pages 29-35

  7. Natural Lithography

    • Christo Papadopoulos
    Pages 37-44

  8. Direct-Growth and Self-assembly

    • Christo Papadopoulos
    Pages 45-61

  9. Practical Examples and Case Studies of Nanofabrication

    • Christo Papadopoulos
    Pages 63-81
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Keywords

About this book

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.

Authors and Affiliations

  • Victoria, Canada

    Christo Papadopoulos

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