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An Intelligent Nanofabrication Probe for Surface Displacement/Profile Measurement

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Condition Monitoring and Control for Intelligent Manufacturing

Part of the book series: Springer Series in Advanced Manufacturing ((SSAM))

Abstract

This chapter describes a nanofabrication probe for surface displacement measurement and/or surface profile measurement. The probe is the combination of a fast-tool-control (FTC) cutting unit and a force sensor. The FTC cutting unit, which consists of a ring-type PZT actuator and a nanometer capacitance-type displacement sensor, is used for diamond turning of complex surface profiles. The force at the interface between the tip of the cutting tool and the surface can be detected by the force sensor with a sensitivity of 0.01 mN through employing an AC modulation technique. In the displacement/surface profile measurement mode, the surface is tracked by the tool through servo-control of the contact force by the FTCunit, in which the displacement/surface profile can be obtained from the capacitance-type displacement sensor. Probe design and evaluation are presented.

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Author information

Authors and Affiliations

  1. Tohoku University, Sendai, 980-8579, Japan

    Wei Gao

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  1. Wei Gao
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Editor information

Editors and Affiliations

  1. Integrated Manufacturing Technologies Institute, National Research Council of Canada, London, Ontario, N6G 4X8, Canada

    Lihui Wang Ph.D., P.Eng. (Senior Research Officer) (Senior Research Officer)

  2. Department of Mechanical and Industrial Engineering, University of Massachusetts, Amherst, MA, 01003, USA

    Robert X. Gao Ph.D. (Professor) (Professor)

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© 2006 Springer-Verlag London Limited

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Gao, W. (2006). An Intelligent Nanofabrication Probe for Surface Displacement/Profile Measurement. In: Wang, L., Gao, R.X. (eds) Condition Monitoring and Control for Intelligent Manufacturing. Springer Series in Advanced Manufacturing. Springer, London. https://doi.org/10.1007/1-84628-269-1_13

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  • DOI: https://doi.org/10.1007/1-84628-269-1_13

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-84628-268-3

  • Online ISBN: 978-1-84628-269-0

  • eBook Packages: EngineeringEngineering (R0)

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