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Hard Amorphous Hydrogenated Carbon Films and Alloys

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Carbon

Part of the book series: Topics in Applied Physics ((TAP,volume 100))

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Abstract

Hard hydrogenated amorphous carbon films are presently being used in a wide variety of applications as protective coatings. The properties of the carbon films are essentially controlled by the ratio between the number of carbon atoms in sp 2 and sp 3 hybridization states. The properties of the films, which are closely related to the film microstructure, can be tuned by the deposition technique employed and by the growth conditions, with the energy of the impinging species playing the main role in the control of the carbon bonding hybridization. Another way to improve the properties of carbon films is through the incorporation of several elements. In this work, the attention is focused on films deposited by plasma-enhanced chemical vapor deposition, discussing the effects of nitrogen and fluorine incorporation on the film microstructure and on the mechanical and tribological properties.

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Authors and Affiliations

  1. Pontifícia Universidade Católica do Rio de Janeiro, Rua Marquês de São Vicente 225, BR-22452-900, RJ, Rio de Janeiro, Brazil

    Fernando L. Freire

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  1. Fernando L. Freire
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Giacomo Messina Saveria Santangelo

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Freire, F.L. Hard Amorphous Hydrogenated Carbon Films and Alloys. In: Messina, G., Santangelo, S. (eds) Carbon. Topics in Applied Physics, vol 100. Springer, Berlin, Heidelberg . https://doi.org/10.1007/11378235_11

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