Abstract
In this chapter, microfabrication techniques are discussed to enable miniaturized magnetic machines for use with silicon microturbomachinery. These rotational machines could be used as either motors (for motoring or fluidic pumping) or as generators for electrical power generation. Challenges and methods for microfabricating microscale magnetic machines are described, and examples of previously implemented devices are discussed.
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Arnold, D.P., Allen, M.G. (2009). Fabrication of Microscale Rotating Magnetic Machines. In: Lang, J. (eds) Multi-Wafer Rotating MEMS Machines. MEMS Reference Shelf. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-77747-4_5
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DOI: https://doi.org/10.1007/978-0-387-77747-4_5
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