Abstract
Determining mass separation between scattered and recoiled particles by measuring the TOF parameter of neutral or ionic species was first used at low energies; for example at the end of the seventies, Chen and coworkers studied gold targets using 8-keV Ar+.(1) The MeV ERDA techniques were used for many years, but these were principally applied in materials research to determine depth profiles of a specific target matrix element, such as hydrogen or one of its isotopes. With the increasing development of multilayer thin-film microelectronic devices, metalized polymers and advanced ceramic materials, there is a need to depth profile a range of other light elements simultaneously, such as B, C, N, O, Al, Si, P, and some three-dimensional transition metals.
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References
Chen, Y. S., Miller, G. L., Robinson, D. A. H., Wheatley, G. H., and Buck, T. M., Energy and mass spectra of neutral and charged particles scattered and desorbed from gold surfaces, Surf. Sci. 62, 133 (1977).
Groleau, R., Gujrathi, S. C., and Martin, J. R, Time-of-flight system for profiling recoiled light elements, Nucl. Instrum. Methods Phys. Res. 218, 11 (1983).
Thomas, J. R, Fallavier, M., Ramdane, D., Chevarier, N., and Chevarier, A., High-resolution depth profiling of light elements in high atomic mass materials, Nucl. Instrum. Methods Phys. Res. 218, 125 (1983).
Whitlow, H. J., Possnert, G., and Petersson, C. S., Quantitative mass and energy-dispersive elastic recoil spectrometry: Resolution and efficiency considerations, Nucl. Instrum. Methods Phys. Res. Sect. B 27, 448 (1987).
Rabalais, J. W., Schultz, J. A., and Kumar, R., Surface analysis using scattered primary and recoiled secondary neutrals and ions by TOF and ESA techniques, Nucl. Instrum. Methods Phys. Res. 218, 719 (1983).
Nölscher, C., Brenner, K., Knauf, R., and Schmidt, W., Elastic recoil detection analysis of light particles (1H - 160) using 30-MeV sulphur ions, Nucl. Instrum. Methods Phys. Res. 218, 116 (1983).
Gujrathi, S. C., in Metallization of Polymers (Sacher, E., Pireaux, J.-P., and Kowalczyk, S. P., eds.) (ACS Symposium Series 440. American Chemical Society, Washington, D.C. 1990 ), pp. 88–109.
Whitlow, H. J., Petersson, C. S., Reeson, K. J., and Hemment, L. F., Mass-dispersive recoil spectrometry studies of oxygen and nitrogen redistribution in ion-beam-synthesized buried oxynitride layers in silicon, Appl. Phys. Lett. 52, 1871 (1988).
Whitlow, H. J., Time of flight spectroscopy methods for analysis of materials with heavy ions: a tutorial, in Proc. of High-Energy and Heavy Ion-Beams in Materials Analysis ( J. R. Tesmer, ed.) ( Materials Research Society, Albuquerque, 1990 ), pp. 243–256.
Busch, F., Pfeffer, W., Kohlmeyer, B., Schtill, D., and Ptilhoffer, F., A position-sensitive transmission time detector, Nucl. Instr. Meth. 171, 71 (1980).
Smith, A. D., and Allington-Smith, J. R., A study of microchannel plate intensifiers, IEEE Trans. Nucl. Sci. 33, 295 (1986).
Hammamatsu Technical Manual RES-0795, Characteristics and applications of microchannel plates (1989).
Pferdekämper, K. E., and Clerc, H. G., Energy distribution of electrons ejected from a thin carbon foil by alpha particles and fission products, Z. Phys. A275, 223 (1975).
Sternglass, E. J., Theory of secondary electron emission by high-speed ions, Phys. Rev. 108, 1 (1957).
Clerc, H. G., Gehrhardt, H. J., Richter, L., and Schmidt, K. H., Heavy-ion-induced secondary electron emission. A possible method for Z-identification, Nucl. Instrum. Methods Phys. Res. 113, 325 (1973).
Clouvas, A., and Katsanos, A., Heavy-ion-induced electron emission from thin carbon foils, Phys. Rev. B: Condens. Matter 43, 2496 (1991).
Girard, J., and Bolore, M., Heavy-ion timing with channel plates, Nucl. Instrum. Methods Phys. Res. 140, 279 (1977).
Kavalov, R. L., Margaryan, Yu. L.. Panyan, M. G., and Papyan, G. A., A zero-time detector of charged particles based on secondary electron emission from low-density dielectrics, Nucl. Instrum. Methods Phys. Res. Sect. A 237, 543 (1985).
Starzecki, W., Stefanini, A. M., Lunardi, S., and Signorini, C., A compact time-zero detector for mass identification of heavy ions, Nucl. Instrum. Methods Phys. Res. Sect. B 193, 499 (1982).
Ghetti, R., Jakobsson, B., and Whitlow, H. J., Measurements of the response function of silicon diode detectors for heavy ions using a time of flight technique, Nucl. Instrum. Methods Phys. Res. Sect. A 317, 235 (1992).
Amsel, G., Cohen, C., and L’Hoir, A., Experimental measurements, mathematical analysis, and partial deconvolution of the asymmetrical response of surface-barrier detectors to MeV 4He, 12C, 14N, and 160 ions, in Ion Beam Surface Layer Analysis, Vol. 2 ( O. Meyer, G. Linker, and E Kappeler, eds.) (Plenum, New York, 1976 ), pp. 953–64.
O’Connor, D. J., and Tan, C., Application of heavy ions to high-depth resolution RBS, Nucl. Instrum. Methods Phys. Res. Sect. B 36, 178 (1989).
Hult, M., El Bouanani, M., Persson, L., Whitlow, H. J., Andersson, M., Zaring, C., Östling, M., Cohen, D. D., Dytlewsli, N., Bubb, I. F., Johnston, P. N., and Walker, S. R., Empirical characterisation of mass distribution broadening in ToF-E recoil spectrometry, Nucl. Instrum. Methods Phys. Res. Sect. B 101, 263 (1995).
Goppelt, P., Gebauer, B., Fink, D., Wilpert, M., Wilpert, T.H., and Bohne, W., High-energy ERDA with very heavy ions using mass-and energy-dispersive spectrometry, Nucl. Instrum. Methods Phys. Res. Sect. B 68, 235 (1992).
Whitlow, H. J., Jakobsson, B., and Westerberg, D. L., Mass resolution of recoil fragment detector telescopes for 0.05–0.5 A MeV heavy recoiling fragments, Nucl. Instrum. Methods Phys. Res. Sect. A 310, 636 (1991).
Stanescu, T. M., Meyer, J. D., Baumann, H., and Bethge, K., Time-of-flight spectrometry for materials analysis, Nucl. Instrum. Methods Phys. Res. Sect. B 50, 167 (1990).
Martin, J. W., Cohen, D. D., Dytlewski, N., Garton, D. B., Whitlow, H. J., and Russell, G. J., Materials characterisation using heavy-ion elastic recoil time-of-flight spectrometry, Nucl. Instrum. Methods Phys. Res. Sect. B 94, 277 (1994).
Shima, K., Kuno, N., Yamanouchi, M., and Tawara, H., Equilibrium charge fractions of ions of Z = 4–92 emerging from a carbon foil, Atom. Data Nucl. Data Tables 51, 173 (1992).
Laegsgaard, E., Position-sensitive semiconductor detectors, Nucl. Instrum. Methods Phys. Res. 162, 93 (1979).
Räisänen, J., Rauhala, E., Knox, J. M., and Harmon, J. E, Non-Rutherford cross sections in heavy-ion elastic recoil spectrometry: 40–70 MeV 32S ions on carbon, nitrogen, and oxygen, J. Appl. Phys. 75, 3273 (1994).
Räisänen, J., and Rauhala, E., Angular distributions of 12C, 14N and 16O ion elastic scattering by sulfur near the Coulomb barrier and the high-energy limits of heavy-ion Rutherford scattering, J. Appl. Phys. 77, 1762 (1995).
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© 1996 Plenum Press, New York
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Dytlewski, N. (1996). Time of Flight ERDA. In: Forward Recoil Spectrometry. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0353-4_6
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DOI: https://doi.org/10.1007/978-1-4613-0353-4_6
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