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Synthesis with Piezoelectric Actuation

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Optimal Synthesis Methods for MEMS

Part of the book series: Microsystems ((MICT,volume 13))

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Synopsis

Synthesis methods, such as topology optimization method, have been widely applied to design mechanical structures. Therefore, it is natural that they can also be applied to design smart materials and MEMS structures whose current development has been based on the use of simple analytical models, test of prototypes, and analysis using the finite element method (FEM), usually limiting the problem to a parametric optimization. In contrast to those approaches, this chapter presents systematic synthesis methods for MEMS actuated by piezoelectric materials by using topology optimization combined with homogenization technique. In this method, the topology of a flexible structure coupled to a piezoceramic (flextensional actuator) is designed to maximize the output displacement (or force) in some specified direction. Beginning with a brief introduction to the piezoelectric constitutive equations and the FEM theory applied to the piezoelectricity, the chapter provides a self-contained description of the synthesis method for piezoelectrically actuated MEMS. The examples presented show that the synthesis method is indeed a promising tool to design smart materials and structures.

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Authors and Affiliations

  1. Department of Mechatronics and Mechanical Systems Engineering, Polytechnic School from University of São Paulo, Brazil

    Emílio Carlos Nelli Silva

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  1. Emílio Carlos Nelli Silva
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© 2003 Springer Science+Business Media New York

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Silva, E.C.N. (2003). Synthesis with Piezoelectric Actuation. In: Optimal Synthesis Methods for MEMS. Microsystems, vol 13. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0487-0_5

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  • DOI: https://doi.org/10.1007/978-1-4615-0487-0_5

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-5101-6

  • Online ISBN: 978-1-4615-0487-0

  • eBook Packages: Springer Book Archive

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