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Part of the book series: NATO ASI Series ((NSSB,volume 188))

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Abstract

Reflection high energy electron diffraction (RHEED) is one of the most powerful techniques for structural analysis of surfaces as described by Ino in these proceedings [1]. Several structures have been analyzed such as cleaved MgO(001) [2,3] and hydrogen stabilized Si(001)-1 × 1 surface [4]. In RHEED, the electron beam is incident on the surface at a very small angle. For this particular geometrical condition, the RHEED intensity is quite sensitive to the surface roughness like point defects and steps, which are often present on real surfaces.

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© 1988 Plenum Press, New York

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Kawamura, T. (1988). Calculation of Rheed Intensity from Growing Surfaces. In: Larsen, P.K., Dobson, P.J. (eds) Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces. NATO ASI Series, vol 188. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5580-9_36

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  • DOI: https://doi.org/10.1007/978-1-4684-5580-9_36

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-5582-3

  • Online ISBN: 978-1-4684-5580-9

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