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Design and Analysis of Micro/Meso-scale Machine Tools

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Smart Devices and Machines for Advanced Manufacturing

Abstract

In this chapter, we discuss the important new class of machine tools, the micro/meso-scale machine tool or mMT, which is now addressing the exploding marketplace for miniature components with high relative accuracy requirements, true 3D features, and made in a wide range of engineering materials. These mMTs fill the gap created by the inability of the common MEMS processes to meet the aforementioned needs. In particular, we review a number of research efforts of the late 1990s and early 2000s that have been directed toward the development of the “mMT” and “microfactory” paradigms. We then provide in-depth discussions of efforts by Northwestern University (3-axis mMT) and the University of Illinois at Urbana-Champaign (5-axis mMT), introducing both the design principles used and technologies adopted in creating prototype mMTs. A machine tool calibration methodology specifically developed for mMTs is then presented. Finally, we will discuss recent efforts in Japan, Europe and the US to commercialise the mMT paradigm.

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Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Northwestern University, Evanston, IL, USA

    K. F. Ehmann & J. Cao

  2. University of Illinois at Urbana-Champaign, IIT-Kanpur, India

    K. F. Ehmann

  3. Chung Yuan Christian University, Taiwan

    K. F. Ehmann

  4. Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA

    R. E. DeVor & S. G. Kapoor

  5. IIT-Kanpur, India

    S. G. Kapoor

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  1. K. F. Ehmann
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  2. R. E. DeVor
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  3. S. G. Kapoor
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  4. J. Cao
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Editors and Affiliations

  1. National Research Council of Canada, London, Ontario, N6G 4X8, Canada

    Lihui Wang PhD, PEng (Senior Research Officer) (Senior Research Officer)

  2. Ryerson University, Toronto, Ontario, M5B 2K3, Canada

    Jeff Xi PhD, PEng (Professor) (Professor)

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Ehmann, K.F., DeVor, R.E., Kapoor, S.G., Cao, J. (2008). Design and Analysis of Micro/Meso-scale Machine Tools. In: Wang, L., Xi, J. (eds) Smart Devices and Machines for Advanced Manufacturing. Springer, London. https://doi.org/10.1007/978-1-84800-147-3_12

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  • DOI: https://doi.org/10.1007/978-1-84800-147-3_12

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-84800-146-6

  • Online ISBN: 978-1-84800-147-3

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