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Dimensional-Nanopatterned Piezoresistive Silicon Microcantilever for Environmental Sensing

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Advanced MEMS/NEMS Fabrication and Sensors

Abstract

Microcantilevers are the most simplified microelectromechanical system (MEMS)-based devices. Resonant piezoresistive silicon microcantilevers (PMCs) coated with sensitive materials, especially the PMCs patterned with sensing nanostructures of large surface area which work as analytical systems, offer great opportunity for the development and mass production of extremely sensitive sensors for real-time in situ detecting of many chemical and explosive gases, at room temperature. In this chapter, we introduce the figure of merit of PMC-based gas sensors, regarding their operation modes, signal transduction methods, and online tracking techniques. The dimensional nanopatterning of PMCs using different strategies, such as bottom-up methods, top-down methods, and the combination of both, is further and extensively presented and discussed. Examples of recent gas sensor applications using PMCs which are fabricated with nanopatterning on the basis of these aforementioned techniques are given in detail.

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Acknowledgements

This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation program under No. 19ENG05 Nanowires.

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Authors and Affiliations

  1. Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Braunschweig, Germany

    Jiushuai Xu & Erwin Peiner

  2. Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Braunschweig, Germany

    Jiushuai Xu & Erwin Peiner

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  1. Jiushuai Xu
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  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, China

    Zhuoqing Yang

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Xu, J., Peiner, E. (2022). Dimensional-Nanopatterned Piezoresistive Silicon Microcantilever for Environmental Sensing. In: Yang, Z. (eds) Advanced MEMS/NEMS Fabrication and Sensors. Springer, Cham. https://doi.org/10.1007/978-3-030-79749-2_2

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