Abstract
Secondary Ion Mass Spectrometry (SIMS ) is an extremely powerful technique for analysing surfaces, owing in particular to its excellent sensitivity , high dynamic range , very high mass resolution , and ability to differentiate between isotopes . The combination of He/Ne microscopy and SIMS makes it possible not only to obtain SIMS information limited only by the size of the probe–sample interaction (~10 nm), but also to directly correlate such SIMS images with high-resolution (0.5 nm) secondary electron images of the same zone taken at the same time. This chapter will discuss the feasibility of combining SIMS with Helium Ion Microscopy from a fundamental and instrumental point of view.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
J.P. Biersack, L.G. Haggmark, Nucl. Instrum. Methods 174, 257 (1980)
J.P. Biersack, W. Eckstein, Appl. Phys. A-Matter 34, 73 (1984)
W. Eckstein, W. Möller, Nucl. Instrum. Methods Phys. Res. B 7(8), 727 (1985)
T. Wirtz, P. Philipp, J.-N. Audinot, D. Dowsett, S. Eswara, Nanotechnology 26, 434001 (2015)
W. Moller, W. Eckstein, Nucl. Instrum. Methods Phys. Res. B 230, 814 (1984)
W. Eckstein, J.P. Biersack, Appl. Phys. A-Matter 37, 95 (1985)
W. Moller, W. Eckstein, J.P. Biersack, Comput. Phys. Commun. 51, 355 (1988)
J. Lindhard, M. Scharff, Phys. Rev. 124, 128 (1961)
K. Wittmaack, Surf. Sci. Rep. 68, 108 (2013)
K. Wittmaack, Anal. Chem. 86, 5962 (2014)
G. Slodzian, Surf. Sci. 48, 161 (1975)
G. Slodzian, Phys. Scr. T6, 54 (1983)
K. Franzreb, J. Lörincik, P. Williams, Surf. Sci. 573, 291 (2004)
M. Bernheim, G. Slodzian, Journal de Physique Lettres 38, L325 (1977)
M. Bernheim, J. Rebière, G. Slodzian, Proceedings of the Second International Conference on Secondary Ion Mass Spectrometry (SIMS II);40 (1979)
T. Wirtz, H.N. Migeon, Surf. Sci. 557, 57 (2004)
T. Wirtz, H.N. Migeon, Appl. Surf. Sci. 222, 186 (2004)
P. Philipp, T. Wirtz, H.N. Migeon, H. Scherrer, Int. J. Mass Spectrom. 253, 71 (2006)
P. Philipp, T. Wirtz, H.N. Migeon, H. Scherrer, Appl. Surf. Sci. 252, 7205 (2006)
A. Benninghoven, Werner H. Wand, F.G. Rüdenauer, Secondary ion mass spectrometry: basic concepts, instrumental aspects, applications and trends (Wiley-Interscience, New York, Chichester, Brisbane, Toronto, Singapore, 1987)
Y. Gao, J. Appl. Phys. 64(7), 3760 (1988)
T. Wirtz, H.N. Migeon, H. Scherrer, Int. J. Mass Spectrom. 225, 135 (2003)
H. Gnaser, H. Oechsner, Surf. Interface Anal. 21, 257 (1994)
Y. Gao, Y. Marie, F. Saldi, H.N. Migeon, Proceedings of the Ninth International Conference on Secondary Ion Mass Spectrometry (SIMS IX) 406 (1993)
W. Compston, S.W.J. Clement, Appl. Surf. Sci. 252, 7089 (2006)
Y. Fleming, T. Wirtz, Beilstein J. Nanotechnol. 6, 1091 (2015)
H. Oechsner, H. Schoof, E. Stumpe, Surf. Sci. 76, 343 (1978)
W. Vandervorst, Appl. Surf. Sci. 255, 805 (2008)
M.Y. Chan, P.S. Lee, V. Ho, H.L. Seng, J. Appl. Phys. 102 (2007)
A. Redinger, K. Hönes, X. Fontan, V. Izquierdo-Roca, E. Saucedo, N. Valle, A. Prez-Rodriguez, S. Siebentritt, Appl. Phys. Lett. 98 (2011)
T. Wirtz, N. Vanhove, L. Pillatsch, D. Dowsett, S. Sijbrandij, J. Notte, Appl. Phys. Lett. 101, 041601 (2012)
J.F. Ziegler, J. Biersack, U. Pand Littmark, The Stopping and Range of Ions in Solids (Pergamon, 1985)
L. Pillatsch, N. Vanhove, D. Dowsett, S. Sijbrandij, J. Notte, T. Wirtz, Appl. Surf. Sci. 282, 908 (2013)
T. Wirtz, H.N. Migeon, Appl. Surf. Sci. 231–232, 940 (2004)
J. Orloff, L.W. Swanson, M. Utlaut, J. Vac. Sci. Technol. B 14(6), 3759 (1996)
V. Castaldo, C.W. Hagen, P. Kruit, E. van Veldhoven, D. Maas, J. Vac. Sci. Technol. B 27, 3196 (2009)
M. Guilhaus, D. Selby, V. Mlynski, Mass Spectrom. Rev. 19, 65 (2005)
D. Dowsett, T. Wirtz, N. Vanhove, L. Pillatsch, S. Sijbrandij, J. Notte, J. Vac. Sci. Technol. B 30, 06F602 (2012)
Acknowledgments
Some of the work presented in this paper was funded by the National Research Fund of Luxembourg by the grants FNR-MAT-08-01, C09/MS/13, C10/MS/801311 and C13/MS/5951975.
This work was supported in part by the Intelligence Advanced Research Projects Activity (IARPA) via Air Force Research Laboratory (AFRL) contract number FA8650-11-C-7100. The U.S. government is authorised to reproduce and distribute reprints for governmental purposes, notwithstanding any copyright annotation thereon. The views and conclusions contained herein are those of the authors and should not be interpreted as necessarily representing the official policies or endorsements, either expressed or implied, of IARPA, AFRL, or the U.S. government.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2016 Springer International Publishing Switzerland
About this chapter
Cite this chapter
Wirtz, T., Dowsett, D., Philipp, P. (2016). SIMS on the Helium Ion Microscope: A Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics. In: Hlawacek, G., Gölzhäuser, A. (eds) Helium Ion Microscopy. NanoScience and Technology. Springer, Cham. https://doi.org/10.1007/978-3-319-41990-9_13
Download citation
DOI: https://doi.org/10.1007/978-3-319-41990-9_13
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-41988-6
Online ISBN: 978-3-319-41990-9
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)