Abstract
Research was conducted to investigate the effects of chemical vapor deposition of elements on the structure of nanocomposite layers using an integrated method.
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Stetsko, A.E. (2017). Effect of Chemical Vapor Deposition on the Morphology of the Nanocomposite Layer in the Complex Method. In: Fesenko, O., Yatsenko, L. (eds) Nanophysics, Nanomaterials, Interface Studies, and Applications . NANO 2016. Springer Proceedings in Physics, vol 195. Springer, Cham. https://doi.org/10.1007/978-3-319-56422-7_46
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DOI: https://doi.org/10.1007/978-3-319-56422-7_46
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