Abstract
The synthesis and room temperature chemical gas sensing behavior of the as-grown n-Tin Oxide (SnO2) on p-type polycrystalline Silicon (pc-Si) and silicon nanowires (SiNWs) on Silicon substrate are reported in this paper. The Metal assisted Chemical Etching of pc-Si has resulted into vertically aligned, uniform grown highly dense SiNWs. These NWs on pc-Si substrate are decorated by SnO2 particles by the Electro-deposition technique. The surface morphology of fabricated device by SEM depicts SnO2 particles deposition on top of SiNWs. The sensing responses of pristine and tin oxide decorated Si substrate are compared with the sensing behavior of in situ and tin oxide modified SiNWs under the ammonia, acetone and ethanol environment. These results suggest that the proposed tin oxide decorated SiNWs shows analyte selectivity with appreciable rise in responsivity (more than 50%) due to nanostructure of SiNWs template.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
J. Zhang, X. Liu, G. Neri, N. Pinna, Nanostructured materials for room-temperature gas sensors. Mater. Views 28, 795–831 (2016)
A. Cao, E.J.R. Sudhölter, L.C.P.M. de Smet, Silicon nanowire based devices for gas-phase sensing. Sensors 14, 245–271 (2014)
N. Lal, Room temperature gas sensing with ultrathin Au nanowires. J. Mater. Sci. Eng. 5, 1–5 (2016)
Y. Cui, Z. Zhong, D. Wang, W.U. Wang, C.M. Lieber, High performance silicon nanowire field effect transistors. Nano Lett. 3, 149–152 (2003)
Y. Cui, X. Duan, J. Hu, C.M. Lieber, Doping and electrical transport in silicon nanowires. J. Phys. Chem. 104, 5213–5216 (2000)
R.M. Penner, Chemical sensing with nanowires. Ann. Rev. Anal. Chem. 5, 461–485 (2012)
G. Rawat, D. Somvanshi, Y. Kumar, H. Kumar, C. Kumar, Electrical and ultraviolet-a detection properties of e-beam evaporated n-TiO2 capped p-Silicon nanowires heterojunction didoe. IEEE Trans. Nanotechnol. 16, 49–57 (2017)
T. Nishino, Y. Hamakawa, Electrical and optical properties of Si-SnO2 heterojunction. Jpn. J. Appl. Phys. 9, 1085–1090 (1970)
S. Baco, A. Chik, Study on optical properties of tin oxide thin film at different annealing temperature. J. Sci. Technol. 61–72 (2011)
B.N. Joshi, H. Yoon, S.S. Yoon, Structural, optical and electrical properties of tin oxide thin films by electrostatic spray deposition. J. Electrostat. 71, 48–52 (2013)
A.G. Nassiopoulou, V. Gianneta, C. Katsogridakis, Si nanowires by a single-step metal-assisted chemical etching process on lithographic defined areas: formation kinetics. Nanoscale Res. Lett. 6, 1–8 (2011)
M.A. Lachiheb, N. Nafie, M. Bouaicha, The dual role of silver during silicon etching in HF solution. Nanoscale Res. Lett. 7, 1–5 (2012)
K.A. Gonchar, A.A. Zubairova, A. Schleusener, L.A. Osminkina, V. Sivakov, Optical properties of silicon nanowires fabricated by environmental friendly chemistry. Nanoscale Res. Lett. 11, 1–5 (2016)
N. Mukherjee et al., Galvanic deposition of nanocrystalline Zinc Oxide thin films from Zn-Zn(OH)2 mixed phase precursor on p-silicon substrate. Nanotechnology 17, 2665–2669 (2006)
F. Demami, L. Ni, R. Rogel, A.-C. Salaun, L. Pichon, Silicon nanowires based resistors as gas sensors. Sens. Actuators B Chem. 170, 158–170 (2011). Elsevier
C.S. Rout, M. Hegde, A. Govindaraj, C.N.R. Rao, Ammonia sensors based on metal oxide nanosructures. Nanotechnology 2007 (2007)
Acknowledgements
The authors are thankful to Dr. Ashok K. Chauhan, Founder President, Amity University, Noida for his continuous guidance and encouragement. The authors would also like to thank Dr. D. N. Singh from IndoSolar Pvt. Ltd., India for providing the silicon wafer to carry out the experiments.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2019 Springer Nature Switzerland AG
About this paper
Cite this paper
Yuvaraja, S. et al. (2019). A Comparative Study of Metal Oxide Modified, Silicon Wafer and Silicon Nanowires on Silicon Chip as Gas/Vapor Sensing Element. In: Sharma, R., Rawal, D. (eds) The Physics of Semiconductor Devices. IWPSD 2017. Springer Proceedings in Physics, vol 215. Springer, Cham. https://doi.org/10.1007/978-3-319-97604-4_142
Download citation
DOI: https://doi.org/10.1007/978-3-319-97604-4_142
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-97603-7
Online ISBN: 978-3-319-97604-4
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)