Integrated Optics

Abstract

Integrated optics covers a very wide field. Silicon, polysilicon, SiO₂, and Si₃N₄ are among the materials which are important in integrated optics due to the highly developed silicon process technology. Although Si-based elements are only a subdivision of integrated optics, the number of reports describing Si-based elements is very large and only some of them can be discussed here. Among the Si-based elements of integrated optics, examples of waveguides, filters, optical amplifiers, micro-spectrometers, pressure and distance sensors, gratings, grating couplers, and beam splitters fabricated on silicon will be summarized in this chapter. After waveguides, a grating coupler, a photonic bandgap filter, and an optical amplifier, the other elements will be described together with their implementation in integrated optical systems. The so-called planar hybrid-integration electronic-module packaging, the Z-axis photonic interconnect approach and fiber-connector packaged ICs are included as examples of optical interconnect technology. Furthermore, an optical transceiver based on wavelength division multiplexing will be described. Furthermore, a microsystem for fluorescence analysis and optical switches have been added in this extended edition.