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Calibration of Optical Surface Topography Measuring Instruments

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Optical Measurement of Surface Topography

Abstract

The increased use of areal surface topography measuring instruments in the past ten years has led to a range of optical instruments being developed and becoming commercially available. Such instruments make use of sophisticated mathematical algorithms to process the raw height information and transform it into topography data that are used for visualisation and calculation of areal surface texture parameters. Optical areal surface topography measuring instruments are powerful and flexible tools of a complex design, which makes them difficult to calibrate. Because the calibration process is an essential part of quality control during production it is very difficult for an industrial user to exploit the benefits of these instruments. This chapter endeavours to provide some guidance on calibrating optical areal surface topography measuring instruments according to the ISO 25178 suite of specification standards on areal surface topography measurement. Mainly the calibration of the geometrical characteristics of the instruments is discussed with the addition of some brief comments on the effect of filtration and areal surface texture parameters calculation.

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Leach, R., Giusca, C. (2011). Calibration of Optical Surface Topography Measuring Instruments. In: Leach, R. (eds) Optical Measurement of Surface Topography. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-12012-1_4

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