Skip to main content

Evolutionary Algorithms for Planar MEMS Design Optimisation: A Comparative Study

  • Chapter
Nature Inspired Cooperative Strategies for Optimization (NICSO 2010)

Part of the book series: Studies in Computational Intelligence ((SCI,volume 284))

Abstract

The evolutionary approach in the design optimisation ofMEMS is a novel and promising research area. The problem is of a multi-objective nature; hence, multi-objective evolutionary algorithms (MOEA) are used. The literature shows that two main classes of MOEA have been used in MEMS evolutionary design Optimisation, NSGA-II and MOGA-II. However, no one has provided a justification for using either NSGA-II or MOGA-II. This paper presents a comparative investigation into the performance of these two MOEA on a number of MEMS design optimisation case studies. MOGA-II proved to be superior to NSGA-II. Experiments are, herein, described and results are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Fujita, H.: Two Decades of MEMS– from Surprise to Enterprise. In: Proceedings of MEMS, Kobe, Japan, January 21-25 (2007)

    Google Scholar 

  2. Hsu, T.R.: MEMS and Microsystems, 2nd edn. Wiley, Chichester (2008)

    Google Scholar 

  3. Isoda, T., Ishida, Y.: Seperation of Cells using Fluidic MEMS Device and a Quantitative Analysis of Cell Movement. Transactions of the Institute of Electrical Engineering of Japan 126(11), 583–589 (2006)

    Google Scholar 

  4. Hostis, F.l., Green, N.G., Morgan, H., Akaisi, M.: Solid state AC electroosmosis micro pump on a Chip. In: International Conference on Nanoscience and Nanotechnology, ICONN, Brisbane, Qld, July 2006, pp. 282–285 (2006)

    Google Scholar 

  5. Hao, Y., Zhang, D.: Silicon-based MEMS process and standardization. In: Proceedings of the 7th International Conference on Solid-State and Integrated Circuits Technology 2004, vol. 3, pp. 1835–1838 (2004)

    Google Scholar 

  6. Fedder, G.: Structured Design of Integrated MEM. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, Orlando, FL, USA, pp. 1–8 (1999)

    Google Scholar 

  7. Senturia, S.D.: Microsystem Design. Kluwer Academic Publishers, Dordrecht (2001)

    Google Scholar 

  8. Haronain, D.: Maximizing microelectromechanical sensor and actuator sensitivity by optimizing geometry. Sensors and Actuators A 50, 223–236 (1995)

    Article  Google Scholar 

  9. Iyer, S., Mukherjee, T., Fedder, G.: Automated Optimal Synthesis of Microresonators. In: Solid-State Sensors and Actuators, Chicago, IL, pp. 12–19 (1997)

    Google Scholar 

  10. Kamalian, R., Zhou, N., Agogino, A.M.: A Comparison of MEMS Synthesis Techniques. In: Proceedings of the 1st Pacific Rim Workshop on Transducers and Micro/Nano Technologies, Xiamen, China, July 22-24, pp. 239–242 (2002)

    Google Scholar 

  11. Li, H., Antonsson, E.K.: Evolutionary Techniques in MEMS Synthesis. In: Proc. DETC 1998, 1998 ASME Design Engineering Technical Conferences, Atlanta, GA (1998)

    Google Scholar 

  12. Zhou, N., Agogino, A.M., Pister, K.S.: Automated Design Synthesis for Micro-Electro-Mechanical Systems (MEMS). In: Proceedings of the ASME Design Automation Conference, ASME CD ROM, Montreal, Canada, September 29-October 2 (2002)

    Google Scholar 

  13. Kamalian, R.H., Takagi, H., Agogino, A.M.: Optimized Design of MEMS by Evolutionary Multi-objective Optimization with Interactive Evolutionary Computation. In: Deb, K., et al. (eds.) GECCO 2004. LNCS, vol. 3103, pp. 1030–1041. Springer, Heidelberg (2004)

    Google Scholar 

  14. Zhang, Y., Kamalian, R., Agogino, A.M., Sequin, C.: Hierarchical MEMS Synthesis and Optimization. In: Varadan, V.K. (ed.) Proceedings of SPIE, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology. International Society for Optical Engineering, CD ROM. Paper 5763-12, vol. 5763, pp. 96–106 (2005)

    Google Scholar 

  15. Zhou, N., Zhu, B., Agogino, A.M., Pister, K.: Evolutionary Synthesis of MEMS (Microelectronic Mechanical Systems) Design. In: Proceedings of ANNIE 2001, IEEE Neural Networks Council and Smart Engineering Systems Laboratory, Marriott Pavilion Hotel, St. Louis, Missouri, November 4-7, vol. 11, pp. 197–202. ASME Press (2001)

    Google Scholar 

  16. Benkhelifa, E., Farnsworth, M., Tiwari, A., Zhu, M.: An Integrated Framework for MEMS Design Optimisation using modeFrontier. In: EnginSoft International Conference 2009, CAE Technologies For Industry and ANSYS Italian Conference 2009 (2009)

    Google Scholar 

  17. Lohn, J.D., Kraus, W.F., Hornby, G.S.: Automated Design of a MEMS Resonator. In: Proceedings of the Congress on Evolutionary Computation, pp. 3486–3491 (2007)

    Google Scholar 

  18. Poles, S.: MOGA-II An Improved Multi-Objective Genetic Algorithm. Technical report 2003-006, Esteco, Trieste (2003)

    Google Scholar 

  19. Deb, K., Agrawal, S., Pratap, A., Meyarivan, T.: A fast elitist non-dominated sorting genetic algorithm for multi-objective optimization: NSGA-II. In: Schonauer, M., et al. (eds.) PPSN 2000. LNCS, vol. 1917, pp. 849–858. Springer, Heidelberg (2000)

    Chapter  Google Scholar 

  20. Benkhelifa, E., Farnsworth, M., Bandi, G., Tiwari, A., Zhu, M., Ramsden, J.: Design and Optimisation of Microelectromechanical Systems: A Review of the State-of-the-Art. International Journal of Design Engineering, Special Issue Evolutionary Computing for Engineering Design (2009) (accepted to be published)

    Google Scholar 

  21. Zhang, Y., Kamalian, R., Agogino, A.M., Séquin, C.H.: Design Synthesis of Microelectromechanical Systems Using Genetic Algorithms with Component-Based Geno-type Representation. In: Proc. of GECCO 2006 (Genetic and Evolutionary Computation Conference), Seattle, July 8-12, vol. 1, pp. 731–738 (2006) ISBN 1-59593 187-2

    Google Scholar 

  22. Poloni, C., Pediroda, V.: GA coupled with computationally expensive simulations: tools to improve efficiency. In: Genetic Algorithms and Evolution Strategies in Engineering and Computer Science, pp. 267–288. John Wiley and Sons, England (1997)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2010 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Benkhelifa, E., Farnsworth, M., Tiwari, A., Zhu, M. (2010). Evolutionary Algorithms for Planar MEMS Design Optimisation: A Comparative Study. In: González, J.R., Pelta, D.A., Cruz, C., Terrazas, G., Krasnogor, N. (eds) Nature Inspired Cooperative Strategies for Optimization (NICSO 2010). Studies in Computational Intelligence, vol 284. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-12538-6_17

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-12538-6_17

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-12537-9

  • Online ISBN: 978-3-642-12538-6

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics