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Physikalische Grundlagen gasgetragener partikulärer Kontaminationen

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Reinraumtechnik

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Zusammenfassung

Viele der heutigen Produkte sind während ihrer Herstellung sehr empfindlich gegenüber Schad- bzw. Fremdstoffen in ihrer Umgebung. Diese Empfindlichkeit war und ist der Auslöser für die Entwicklung und die stetige Weiterentwicklung der sogenannten Reinen Technologien. Die Zielsetzung der Reinen Technologien ist es, die Schad- bzw. Fremdstoffe in der Reichweite der Produkte auf einen vorgegebenen Grenzwert zu reduzieren. Um diese Zielsetzung zu erreichen, sind die einzelnen Stoffströme sowohl im Reinraum als auch in den entsprechenden geschlossenen Prozesssystemen zu betrachten.

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Authors and Affiliations

  1. Institut für Energie- und Umwelttechnik e.V., Bliersheimer Straße 60, 47229, Duisburg, Deutschland

    Prof. Dr.-Ing. Heinz Fißan & Dr.-Ing. Christof Asbach

  2. FG Nanostrukturtechnik, Universität Duisburg-Essen, Bismarckstraße 81, 47057, Duisburg, Deutschland

    Dipl.-Ing. Andreas Trampe

Authors
  1. Prof. Dr.-Ing. Heinz Fißan
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  2. Dipl.-Ing. Andreas Trampe
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  3. Dr.-Ing. Christof Asbach
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Corresponding author

Correspondence to Heinz Fißan .

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Editors and Affiliations

  1. Humboldtstraße 32, Wiesbaden, 65189, Germany

    Lothar Gail

  2. technik und Automatisierung IPA, Fraunhofer-Institut für Produktions-, Nobelstraße 12, Stuttgart, 70569, Germany

    Udo Gommel

  3. Wickerer Weg 8, Hattersheim, 65795, Germany

    Hans-Peter Hortig

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Fißan, H., Trampe, A., Asbach, C. (2012). Physikalische Grundlagen gasgetragener partikulärer Kontaminationen. In: Gail, L., Gommel, U., Hortig, HP. (eds) Reinraumtechnik. VDI-Buch(). Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-19435-1_2

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