Abstract
Aspects of the measurement and manufacture of mainly optical components from early times, the present and the future are described. Two instrumental types having the best pedigree and most potential are singled out namely the stylus method and optical methods with, in the latter case, scanning white light interferometry. Critical issues are highlighted and some examples of future requirements and possible developments are given.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Scott, R.M.: Optical Manufacturing. In: Kingslake, R. (ed.) Applied Optics, vol. III, ch. 2. Academic Press, London (1965)
Singer, C., Holmyard, E.J., Hall, A.R., Williams, T.I.: A History of Technology, vol. II, 336 p. Oxford University press, London (1956)
Britain, A., Wolpert, S., Langford, L.M.: Engraving on Precious metals, ix p. NAG press, London (1958)
Exodus. xxvii, 11
Whitehouse, D.J.: Handbook of surface Metrology. Inst. of Physics publishing, Bristol and Philadelphia (1994)
Whitehouse, D.J.: Surfaces and their measurement, Hermes Penton Science, vol. 7. Hermes Penton Science, London (2002); Tomlinson, P.: NPL research report, National Physical Laboratory, UK (1919)
Schmalz, G.: Z. VDI 73, 144–161 (1929)
Abbott, J., Firestone, A.: A new profilograph measures roughness of finely finished and ground surfaces. Autom. Ind., 204 (1933)
Reason, R.E., Hopkins, Garrott: Rep. Rank Organisation (1944)
Whitehouse, D.J.: Stylus Damage Protection Index. Proc. Inst. Mech. Eng. 214(pt. C), 975 (2000)
Ogilvy, J.A.: Theory of wave scattering from random rough surfaces. Adam Hilger, Bristol (1991)
Tiftikci, K.A.: Development and verification of a micro-mirror based high accuracy confocal microscope. Ph. D. Thesis Eindhoven University of Technology (2005)
Whitehouse, D.J.: Handbook of surface and nano metrology, 2nd edn. Taylor & Francis, London (2010)
Jiang, X., Whitehouse, D.J.: Miniaturized optical Measurement methods for Surface Nanometrology. Annals CIRP 55(1), 577–580 (2006)
de Groot, P., de Lega, X.C., Leisener, J., Darwin, M.: Metrology of optically unresolved features using interferometric surface profiling and RCWA modelling. O.S.A. Optics Express 16(6), 3970 (2008)
de Groot, P., Deck, L.: Surface profiling by analysis of white light interferograms in the spatial frequency domain. J. Mod. Opt. 42, 389–401 (1995)
Moharam, M.G., Grann, E.B., Pommet, D.A.: Formulation for stable and efficient implementation of the rigorous coupled wave analysis of binary gratings. J. Opt. Soc. Am. 12, 1068–1076 (1995)
Raymond, C.J.: Scatterometry for semiconductor metrology. In: Deibold, A.J. (ed.) Handbook of Silicon Semiconductor Metrology. Marcel Decker Inc., New York (2001)
Mansfield, D.: The distorted Helix: thin film extraction from scanning white light interferometry. In: Proc. SPIE, vol. 2186 (2006)
Zhang, X., Jiang, X., Scott, P.J.: A new free-form Surface Fitting Method for Precision Coordinate Metrology. In: 11th International Conference on the Metrology and Properties of Surfaces, Huddersfield UK, pp. 261–266 (2007); FIG 2, p. 264
Yacoot, A., Koenders, L.: From nanometre to miilimetre: a feasibility study of the combination of scanning probe microscopy and a combined optical and x-ray interferometer. Meas. Sci. Technol. 14, N 59–N 63 (2003)
Chen, G., et al.: Researching of a wheeled small polishing robot for large free form surfaces and its kinematics. In: ICFDM, Tianjin P.R. China (September 2008)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2013 Springer Berlin Heidelberg
About this paper
Cite this paper
Whitehouse, D. (2013). Metrology Past, Present and Future with Reference to Optics and Manufacture. In: Brinksmeier, E., Riemer, O., Gläbe, R. (eds) Fabrication of Complex Optical Components. Lecture Notes in Production Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-33001-8_12
Download citation
DOI: https://doi.org/10.1007/978-3-642-33001-8_12
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-33000-1
Online ISBN: 978-3-642-33001-8
eBook Packages: EngineeringEngineering (R0)