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Metrology Past, Present and Future with Reference to Optics and Manufacture

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Fabrication of Complex Optical Components

Part of the book series: Lecture Notes in Production Engineering ((LNPE))

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Abstract

Aspects of the measurement and manufacture of mainly optical components from early times, the present and the future are described. Two instrumental types having the best pedigree and most potential are singled out namely the stylus method and optical methods with, in the latter case, scanning white light interferometry. Critical issues are highlighted and some examples of future requirements and possible developments are given.

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References

  1. Scott, R.M.: Optical Manufacturing. In: Kingslake, R. (ed.) Applied Optics, vol. III, ch. 2. Academic Press, London (1965)

    Google Scholar 

  2. Singer, C., Holmyard, E.J., Hall, A.R., Williams, T.I.: A History of Technology, vol. II, 336 p. Oxford University press, London (1956)

    Google Scholar 

  3. Britain, A., Wolpert, S., Langford, L.M.: Engraving on Precious metals, ix p. NAG press, London (1958)

    Google Scholar 

  4. Exodus. xxvii, 11

    Google Scholar 

  5. Whitehouse, D.J.: Handbook of surface Metrology. Inst. of Physics publishing, Bristol and Philadelphia (1994)

    Google Scholar 

  6. Whitehouse, D.J.: Surfaces and their measurement, Hermes Penton Science, vol. 7. Hermes Penton Science, London (2002); Tomlinson, P.: NPL research report, National Physical Laboratory, UK (1919)

    Google Scholar 

  7. Schmalz, G.: Z. VDI 73, 144–161 (1929)

    Google Scholar 

  8. Abbott, J., Firestone, A.: A new profilograph measures roughness of finely finished and ground surfaces. Autom. Ind., 204 (1933)

    Google Scholar 

  9. Reason, R.E., Hopkins, Garrott: Rep. Rank Organisation (1944)

    Google Scholar 

  10. Whitehouse, D.J.: Stylus Damage Protection Index. Proc. Inst. Mech. Eng. 214(pt. C), 975 (2000)

    Google Scholar 

  11. Ogilvy, J.A.: Theory of wave scattering from random rough surfaces. Adam Hilger, Bristol (1991)

    MATH  Google Scholar 

  12. Tiftikci, K.A.: Development and verification of a micro-mirror based high accuracy confocal microscope. Ph. D. Thesis Eindhoven University of Technology (2005)

    Google Scholar 

  13. Whitehouse, D.J.: Handbook of surface and nano metrology, 2nd edn. Taylor & Francis, London (2010)

    Google Scholar 

  14. Jiang, X., Whitehouse, D.J.: Miniaturized optical Measurement methods for Surface Nanometrology. Annals CIRP 55(1), 577–580 (2006)

    Article  Google Scholar 

  15. de Groot, P., de Lega, X.C., Leisener, J., Darwin, M.: Metrology of optically unresolved features using interferometric surface profiling and RCWA modelling. O.S.A. Optics Express 16(6), 3970 (2008)

    Article  Google Scholar 

  16. de Groot, P., Deck, L.: Surface profiling by analysis of white light interferograms in the spatial frequency domain. J. Mod. Opt. 42, 389–401 (1995)

    Article  Google Scholar 

  17. Moharam, M.G., Grann, E.B., Pommet, D.A.: Formulation for stable and efficient implementation of the rigorous coupled wave analysis of binary gratings. J. Opt. Soc. Am. 12, 1068–1076 (1995)

    Article  Google Scholar 

  18. Raymond, C.J.: Scatterometry for semiconductor metrology. In: Deibold, A.J. (ed.) Handbook of Silicon Semiconductor Metrology. Marcel Decker Inc., New York (2001)

    Google Scholar 

  19. Mansfield, D.: The distorted Helix: thin film extraction from scanning white light interferometry. In: Proc. SPIE, vol. 2186 (2006)

    Google Scholar 

  20. Zhang, X., Jiang, X., Scott, P.J.: A new free-form Surface Fitting Method for Precision Coordinate Metrology. In: 11th International Conference on the Metrology and Properties of Surfaces, Huddersfield UK, pp. 261–266 (2007); FIG 2, p. 264

    Google Scholar 

  21. Yacoot, A., Koenders, L.: From nanometre to miilimetre: a feasibility study of the combination of scanning probe microscopy and a combined optical and x-ray interferometer. Meas. Sci. Technol. 14, N 59–N 63 (2003)

    Google Scholar 

  22. Chen, G., et al.: Researching of a wheeled small polishing robot for large free form surfaces and its kinematics. In: ICFDM, Tianjin P.R. China (September 2008)

    Google Scholar 

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Whitehouse, D. (2013). Metrology Past, Present and Future with Reference to Optics and Manufacture. In: Brinksmeier, E., Riemer, O., Gläbe, R. (eds) Fabrication of Complex Optical Components. Lecture Notes in Production Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-33001-8_12

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  • DOI: https://doi.org/10.1007/978-3-642-33001-8_12

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-33000-1

  • Online ISBN: 978-3-642-33001-8

  • eBook Packages: EngineeringEngineering (R0)

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