Abstract
A hydraulic stroke amplifier made of silicon is described. The system consists of two membranes made of different materials. Both are connected by a non compressive liquid, which completely fills out a micro cavity. The first membrane act as driving membrane and possesses of a silicon plate and a piezoceramic plate bonded together. Applying a voltage onto the piezoceramic plate a pressure will be generated into all directions of the cavity. This pressure forces the output membrane to bend in a direction opposite to the cavity. In contradiction to the first membrane, the output membrane is flabby in bending and very small in cross section. The complete volume shift will be given to the bending of the second membrane due to that and the stiffness of the surrounding walls. Stroke amplifications can be achieved as result. In the experiments we found strokes at the output membrane in a range between 60μm and 120μm depending on the pressure generated at the driving membrane. These values are corresponding with an amplification factor of 20 and more in the idling cycle. The device is made by silicon technologies and adapted microtechnologies. It can be advantageously used in several applications due to the material properties of the output membrane. New designs of micropumps, microvalves and other devices using this new working principle are described.
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References
Bart et al. (1990), Microfabricated electrohydrodynamic pumps, in: Sensors & Actuators A, 21–23 (1990), p. 193–197.
Bosch et al. (1993), A silicon microvalve with combined electromagnetic/electrostatic actuation, in: Sensors & Actuators A, 37–38 (1993), p. 684–692.
Ahn, Allen (1995), Fluid micropumps based on rotary magnetic actuators, in: MEMS’ 95, proceedings, Amsterdam, 408–412.
van de Pol, F.; Breedfeld, P. (1990), Bond-Graph modeling of an electro-thermo- pneumatic micropump, in: MME, Berlin 1990, S. 19–24.
Sato, Shikida (1994), An electrostatically actuated gas valve with an S-shaped film element, in: J. Micromech. Microeng., 4 (1994), p. 205–209.
Wagner, B.; Quenzer, H. (1996), Bistable microvalve with pneumatically coupled membranes, in: IEEE [Hrsg.], MEMS’ 96, proceedings, San Diego, 384–388.
Schwesinger, N ., Planarer Tintenstrahldruckkopf mit piezokeramischem Antrieb, in: Feinwerktechnik Mikrotechnik Meßtechnik F & M, 101. Aufl., 1993, 456–460.
Schwesinger, Bechtel (1998); Micropump for viscous liquids and muds, in: SPIE-proceedings vol. 3515, Santa Clara, 40–45.
Forke (1991), Eine geregelte Membranpumpe als mikrosystemtechnische Lösung, in: Erstes Symp. Mikrosystemtechnik, Regensburg, 1991, S. 131–140
Hirata, S.; Ishii, Y. (1996), An ink-jet using diaphragm microactuator, in: IEEE [Hrsg.], MEMS’ 96, proceedings, San Diego, 418–423.
Jerman (1991 a), Electrical-Activated, Normally-closed Diaphragma Valves, in: Transducers 1991, Technical Digest p. 1045–1048.
Judy et al. (1991), Surface micromachined micromechanical membrane pump, in: MEMS’ 91, proceedings, 182–186.
Richter, Zengerle (1993), Properties and applications of a membrane pump with electrostatic drive, in: “Actuator 93” Bremen 1993, p. 28–33.
Stemme, Stemme (1993); A novel piezoelectric Valve-less Fluid Pump, in: Transducers 1993, digest p. 110–113, Yokohama.
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© 2000 Springer-Verlag Berlin Heidelberg
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Schwesinger, N., Pobering, S. (2000). A new hydraulic stroke amplifier for microfluidic components. In: Ehrfeld, W. (eds) Microreaction Technology: Industrial Prospects. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-59738-1_37
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DOI: https://doi.org/10.1007/978-3-642-59738-1_37
Publisher Name: Springer, Berlin, Heidelberg
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