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Part of the book series: Springer Series in Solid-State Sciences ((SSSOL,volume 121))

Abstract

Several theoretical and experimental results on the dynamics of dissociative adsorption and recombinative desorption of hydrogen on silicon are reviewed.

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© 1996 Springer-Verlag Berlin Heidelberg

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Brenig, W., Groß, A., Höfer, U., Kratzer, P., Russ, R. (1996). Reaction Dynamics of H2/Si: A 5-D Model. In: Okiji, A., Kasai, H., Makoshi, K. (eds) Elementary Processes in Excitations and Reactions on Solid Surfaces. Springer Series in Solid-State Sciences, vol 121. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-61185-8_1

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  • DOI: https://doi.org/10.1007/978-3-642-61185-8_1

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-64738-3

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