Abstract
We have recently developed new models of sputtering [1], ion emission [2], and ion knock-on mixing [3] which provide quick and accurate estimates of neutral and ion sputtering yields and of the broadening observed in a sputter-profiling experiment. In this abstract, we briefly summarize the major features of the sputtering and ion emission models.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
S.A. Schwarz, C.R. Helms, J. Appl. Phys., Aug. 1979, in press.
S.A. Schwarz, C.R. Helms, to be published.
S.A. Schwarz, C.R. Helms, J. Yac. Sci. Techno!., l6, 781 (1979).
E.P. EerNisse, Appl. Phys. Lett. 29, 14 (1976).
D. Rosenberg, G.K. Wehner, J. Appl. Phys. 33, 1842 (1962).
H.G. Privai, Surf. Sci., 76, 443 (1978).
P. Williams, C.A. Evans, Jr., Surf. Sci., 78, 324 (1978).
V.R. Deline, C.A. Evans, Jr., and P. Williams, Appl. Phys. Lett., 33, 578 (1978).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1979 Springer-Verlag New York
About this paper
Cite this paper
Schwarz, S.A., Helms, C. (1979). New Models of Sputtering and Ion Knock-On Mixing. In: Benninghoven, A., Evans, C.A., Powell, R.A., Shimizu, R., Storms, H.A. (eds) Secondary Ion Mass Spectrometry SIMS II. Springer Series in Chemical Physics, vol 9. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-61871-0_4
Download citation
DOI: https://doi.org/10.1007/978-3-642-61871-0_4
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-61873-4
Online ISBN: 978-3-642-61871-0
eBook Packages: Springer Book Archive