Skip to main content
SpringerLink
Log in

Vacuum Arc with Particle Filtering

  • Chapter
  • First Online:
Tetrahedrally Bonded Amorphous Carbon Films I

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 263))

  • 954 Accesses

Abstract

Driving the cathode spots over the target surface by strong external or intrinsic magnetic fields allows to reduce, but not to suppress the emission of target splinters.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 169.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. I.I. Aksenov, Vakuumnaja Duga v Erozionnykh Istocnikakh Plazmy. (=Vacuum arc in eroding plasma sources) (NNZ KhFTI, Kharkhov, 2005)

    Google Scholar 

  2. A. Anders, Approaches to rid cathodic arc plasmas of macro- and nanoparticles: a review. Surf. Coat. Technol. 120–121, 319–330 (1999)

    Google Scholar 

  3. A. Anders, Energetic deposition using filtered cathode arc plasmas. Vacuum 67, 673–686 (2002)

    Article  Google Scholar 

  4. A. Anders, Cathodic Arcs. From Fractal Spots to Energetic Condensation (Springer, New York, 2008)

    Google Scholar 

  5. S. Anders, A. Anders, I.G. Brown, Focused injection of vacuum arc plasmas into curved magnetic filters. J. Appl. Phys. 75, 4895–4899 (1994)

    Article  Google Scholar 

  6. I.I. Aksenov, D.C. Aksenov, V.A Belous, Tekhnika Osazhdeniya Vakuumaya-dugovykh Pokrytiy (=Deposition technique of vacuum-arc coatings.) (NNZ KhFTI, Kharkhov, 2014)

    Google Scholar 

  7. S. Anders, A. Anders, M.R. Dickinson, R.A. McGill, I.G. Brown, S-shaped magnetic macroparticle filter for cathode arc deposition. IEEE Trans. Plasma Sci. 25, 670–675 (1997)

    Article  Google Scholar 

  8. A. Anders, S. Anders, K.M. Yu, X.Y. Yao, I.G. Brown, On the macroparticle flux from vacuum arc cathode spots. IEEE Trans. Plasma Sci. 21, 440–446 (1993)

    Article  Google Scholar 

  9. Aksenov, V.A. Belous, V.G. Padalka, V.M. Khoroshikh, Ustrojstvo dlja ochistki plazmy vakuumnoj dugi ot makrochastic. (=Apparatus to rid the plasma of a vacuum arc of macroparticles) Pribory i Tekhnika Eksperimentas (1978) No. 5, 236–237 Instr. Exp. Tech. 21, 1416–1418 (1978)

    Google Scholar 

  10. I.I. Aksenov, V.A. Belous, V.G. Padalka, V.M. Khoroshikh, Transportirovka plazmennykh potokov v kryvolinejnoj plasmaopticheskoj sisteme. (=Transport of plasma streams in a curvilinear plasma-optics system) Fizika plasmy 4, 758–763 (1978). Soviet J. Plasma Phys. 4, 425–428 (1978)

    Google Scholar 

  11. I.I. Aksenov, V.A. Belous, V.V. Vasilev, Y.Y. Volkov, V.E. Strelnitskij, A rectilinear plasma filtering system for vacuum-arc deposition of diamond-like carbon coatings. Diam. Relat. Mater. 8, 468–471 (1999)

    Article  Google Scholar 

  12. A. Antilla, J. Koskinen, Procedure and apparatus for improving a plasma accelerator plating apparatus used for diamond plating. EP 0 620 867 (30. 12. 1992)

    Google Scholar 

  13. S. Anders, S. Raoux, K. Krishnan, R.A. MacGill, I.G. Brown, Plasma distribution of cathodic arc deposition systems. J. Appl. Phys. 79, 6785–6790 (1996)

    Article  Google Scholar 

  14. I.I. Aksenov, V.E. Strelnitskij, Properties of diamond-like coatings prepared by vacuum arc deposition. Surf. Coat. Technol. 47, 98–105 (1991)

    Article  Google Scholar 

  15. I.I. Aksenov, V.E. Strelnitskij, V.V. Vasilev, DYu. Zaleskij, Efficiency of magnetic plasma filters. Surf. Coat. Technol. 163–164, 118–127 (2003)

    Article  Google Scholar 

  16. E. Alakoski, V.-M. Tiainen, Energy dependence of the carbon plasma beam on the arc voltage and the anode-cathode distance in the pulsed arc discharge method. Diam. Relat. Mater. 14, 1451–1454 (2005)

    Article  Google Scholar 

  17. K. Akari, H. Tamagaki, T. Kumakiri, K. Tsuji, E.S. Koh, C.N. Tai, Reduction in macroparticles during the deposition of TiN films prepared by arc ion plating. Surf. Coat. Technol. 43–44, 312–323 (1990)

    Article  Google Scholar 

  18. R.L. Boxman, Recent development in vacuum arc deposition. IEEE Trans. Plasma Sci. 29, 762–767 (2001)

    Article  Google Scholar 

  19. I.G. Brown, Cathodic arc deposition of films. Ann. Rev. Mater. Sci. 28, 243–269 (1998)

    Article  Google Scholar 

  20. M.M.M. Bilek, A. Anders, I.G. Brown, Characterization of a linear venetian-blind macroparticle filter for cathodic vacuum arcs. IEEE Trans. Plasma Sci. 27, 1197–1202 (1999)

    Article  Google Scholar 

  21. R.L. Boxman, I.I. Beilis, E. Gidalevich, V.N. Zhitomirsky, Magnetic control in vacuum arc deposition: a review. IEEE Trans. Plasma Sci. 33, 1618–1625 (2005)

    Article  Google Scholar 

  22. E.D. Bender, G.I. Dimov, A.S. Krivenko, V.V. Razorenov, Hall current layer formation in arc discharge across magnetic field and transfer of fast ions out of discharge. Rev. Sci. Instr. 77, 013303 (2006)

    Google Scholar 

  23. D.B. Boercker, D.M. Sanders, J. Storer, S. Falabella, Modeling plasma flow in straight and curved solenoids. J. Appl. Phys. 69, 115–120 (1991)

    Article  Google Scholar 

  24. R.L. Boxman, V.N. Zhitomirsky, Vacuum arc deposition devices. Rev. Sci. Instr. 77, 021101 (2006)

    Google Scholar 

  25. R.L. Boxman, V. Zhitomirsky, B. Alterkop, E. Gidalevich, O. Beilis, M. Keidar, S. Goldsmith, Recent progress in filtered arc deposition. Surf. Coat. Technol. 86–87, 243–253 (1996)

    Google Scholar 

  26. E.D. Bender, V.N. Zhitomirsky, R.L. Boxman, Hall stratum filtered cathodic arc source for carbon plasma. Surf. Coat. Technol. 201, 6095–6100 (2007)

    Google Scholar 

  27. B.F. Coll, Plasma and deposition interactions with an enhanced arc, in Thin Films, Proceedings of TATF ’94 & HVITF ’94, ed. by G. Hecht, F. Richter, J. Hahn (DGM Informationsgesellschaft, Oberursel/Germany, 1994), pp. 3–17

    Google Scholar 

  28. B.F. Coll, M. Chhowalla, Amorphous diamond films by enhanced arc evaporation. Surf. Coat. Technol. 79, 76–86 (1996)

    Article  Google Scholar 

  29. B.F. Coll, P. Sathrum, R. Aharonov, M.A. Tamor, Diamond-like carbon films synthesized by cathodic arc evaporation. Thin Solid Films 209, 165–173 (1992)

    Article  Google Scholar 

  30. V.I. Gorokhovsky, R. Bhattacharya, D.G. Bhat, Characterization of large area filtered arc deposition technology: part I – plasma processing parameters. Surf. Coat. Technol. 140, 82–92 (2001)

    Google Scholar 

  31. E.G. Gerstner, D.R. McKenzie, M.K. Puchert, P.Y. Timbrell, J. Zou, Adherent carbon film deposition by cathodic arc with implantation. J. Vac. Sci. Technol. A 13, 406–411 (1995)

    Article  Google Scholar 

  32. J.P. Hirvonen, R. Lappalainen, J. Koskinen, A. Anttila, T.R. Jervis, M. Trkula, Tribological characteristics of diamond-like films deposited with an arc-discharge method. J. Mater. Res. 5, 2524–2530 (1990)

    Article  Google Scholar 

  33. M. Hakovirta, V.-M. Titainen, P. Pekko, Techniques for filtering graphite macroparticles in the cathodic vacuum arc deposition of tetrahedral amorphous carbon films. Diam. Relat. Mater. 8, 1183–1192 (1999)

    Article  Google Scholar 

  34. H. Inaba, K. Furusawa, S. Hirano, S. Sasaki, S. Todoroki, M. Yamasaka, M. Endou, Tetrahedral amorphous carbon films by filtered cathodic vacuum-arc deposition for air-bearing-surface overcoat. Jpn. J. Appl. Phys. 42, 2824–2828 (2003)

    Article  Google Scholar 

  35. D.A. Karpov, Cathodic arc sources and macroparticle filtering. Surf. Coat. Technol. 96, 22–33 (1997)

    Google Scholar 

  36. M. Keidar, I.J. Beilis, R. Aharonov, D. Arbilly, R.L. Boxman, S. Goldsmith, Macroparticle distribution in a quarter-torus plasma duct of a filtered vacuum arc deposition system. J. Phys. D 30, 2972–2978 (1997)

    Google Scholar 

  37. M. Keidar, I.J. Beilis, R.L. Boxman, S. Goldsmith, Transport of macroparticles in magnetized plasma ducts. IEEE Trans. Plasma Sci. 24, 226–233 (1996)

    Article  Google Scholar 

  38. M. Kamiya, T. Yanagita, H. Tanoue, Sh Oke, Y. Suda, H. Takikawa, M. Taki, Y. Hasegawa, T. Ishikawa, H. Yasu, T-shape filtered arc deposition system with built-in electrostatic macro-particle trap for DLC film preparation. Thin Solid Films 518, 1498–1502 (2009)

    Article  Google Scholar 

  39. A. Leson, G. Englberger, D. Hammer, C.-F. Meyer, M. Leonhardt, H.-J. Scheibe, V. Weihnacht, Diamantartige Kohlenstoffschichten steigern die Effizienz - Laser-Arc-Verfahren zur Abscheidung von ta-C-Schichten. (=Diamond-like carbon thin films enhance efficiency – laser arc deposition of ta-C). Vakuum Forschung Praxis 27(4), 24–28 (2015)

    Article  Google Scholar 

  40. R. Lossy, D.L. Pappas, R.A. Roy, J.J. Cuomo, V.M. Sura, Filtered arc deposition of amorphous diamond. Appl. Phys. Lett. 61, 171–173 (1992)

    Article  Google Scholar 

  41. P.J. Martin, A. Bendavid, Review of the filtered vacuum arc process and materials deposition. Thin Solid Films 394, 1–15 (2001)

    Article  Google Scholar 

  42. P.J. Martin, A. Bendavid, H. Takikawa, Ionized vapor plasma deposition and filtered arc deposition: processes, properties and applications. J. Vac. Sci. Technol. A 17, 2351–2359 (1999)

    Google Scholar 

  43. J.-L. Meunier, M. Campbell, M. Kandah, Evidence of columnar diamond growth structures within cathode spot craters of vacuum arcs on carbon. J. Phys. D 36, 3138–3143 (2003)

    Google Scholar 

  44. P.J. Martin, D.R. McKenzie, R.P. Netterfield, P. Swift, S.W. Filipczuk, K.H. Muller, C.G. Pacey, P. James, Characteristics of titanium arc evaporation processes. Thin Solid Films 153, 91–102 (1987)

    Article  Google Scholar 

  45. P.J. Martin, R.P. Netterfield, A. Bendavid, T.J. Kinder, The deposition of thin films by filtered arc evaporation. Surf. Coat. Technol. 54–55, 136–142 (1992)

    Google Scholar 

  46. C.F. Meyer, H.-J. Scheibe, Vorrichtung und Verfahren zur Beschichtung von Substraten in Vakuum. (=Apparatus and method for coating substrates in vacuo) DE 19850218 (26. 8. 1998)

    Google Scholar 

  47. C.-F. Meyer, H.-J. Scheibe, Filtered laser-arc: a new technology for deposition of smooth ta-C films, in International Conference on Metallurgical Coatings and Thin Films (ICMCTF) (San Diego, 2008)

    Google Scholar 

  48. K. Miernik, J. Walkowicz, J. Bujak, Design and performance of the microdroplet filtering system used in cathodic arc coating deposition. Plasma Ions 3, 41–51 (2000)

    Google Scholar 

  49. B. Petereit, Untersuchung und Optimierung einer gepulsten Hochstrom-Bogenquelle zur Herstellung ultradünner Kohlenstoff-Schutzschichten auf Magnetspeicherplatten. (=Investigation and optimization of a pulsed high current arc source for the preparation of ultrathin protective carbon layer on magnetic storage disks) Thesis, Technical University Chemnitz, 2003

    Google Scholar 

  50. A.I. Ryabchikov, I.B. Stepanov, Investigations of forming metal-plasma flows filtered from microparticle fraction in vacuum arc evaporation. Rev. Sci. Instr. 69, 810–812 (1998)

    Google Scholar 

  51. A.I. Ryabchikov, I.B. Stepanov, S.V. Dektjarev, O.V. Sergeev, Vacuum arc ion and plasma source Raduga 5 for materials treatment. Rev. Sci. Instr. 69, 893–895 (1998)

    Google Scholar 

  52. T. Schülke, A. Anders, Velocity distribution of carbon macroparticles generated by pulsed vacuum arcs. Plasma Sources Sci. Technol. 8, 567–571 (1999)

    Google Scholar 

  53. D.M. Sanders, A. Anders, Review of cathodic arc deposition technology at the start of the new millennium. Surf. Coat. Technol. 133–134, 78–90 (2000)

    Google Scholar 

  54. T. Schülke, A. Anders, P. Siemroth, Macro-particle filtering of high-current vacuum arc plasmas. IEEE Trans. Plasma Sci. 25, 660–664 (1997)

    Article  Google Scholar 

  55. J. Storer, J.E. Galvin, I.G. Brown, Transport of vacuum arc plasma through straight and curved magnetic ducts. J. Appl. Phys. 66, 5245–5249 (1989)

    Article  Google Scholar 

  56. X. Shi, B.K. Tay, D.I. Flynn, Q. Ye, Z. Sun, Characterization of filtered cathodic vacuum arc system. Surf. Coat. Technol. 94–95, 195–200 (1997)

    Google Scholar 

  57. X. Shi, Y.Q. Tu, H.S. Tan, B.K. Tay, Simulation of plasma flow in toroidal solenoid filters. IEEE Trans. Plasma Sci. 24, 1309–1318 (1996)

    Article  Google Scholar 

  58. X. Shi, B.K. Tay, H.S. Tan, L. Zhong, Y.Q. Tu, S.R.P. Silva, W.I. Milne, Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy. J. Appl. Phys. 79, 7234–7240 (1996)

    Article  Google Scholar 

  59. X. Shi, B.K. Tay, H.S. Tan, E. Liu, J. Shi, L.K. Cheah, X. Jin, Transport of vacuum arc plasma through an off-plane double bend filtering duct. Thin Solid Films 345, 1–6 (1999)

    Article  Google Scholar 

  60. H. Takikawa, K. Izumi R., Miyano, T. Sakakibara, DLC thin films preparation by cathodic arc deposition with a super droplet-free system. Surf. Coat. Technol. 163–164, 368–373 (2003)

    Google Scholar 

  61. H. Takikawa, H. Tanoue, Review of cathodic arc deposition for preparing droplet-free thin films. IEEE Trans. Plasma Sci. 35, 992–999 (2007)

    Article  Google Scholar 

  62. B.K. Tay, G.F. You, S.P. Lau, X. Shi, Plasma flow simulation in an off-plane double bend magnetic filter. Surf. Coat. Technol. 133–134, 593–597 (2000)

    Google Scholar 

  63. J. Vetter, 60 years of DLC coatings: historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications. Surf. Coat. Technol. 257, 213–240 (2014)

    Google Scholar 

  64. T. Witke, P. Siemroth, Deposition of droplet-free films by vacuum arc evaporation—results and applications. IEEE Trans. Plasma Sci. 27, 1039–1044 (1999)

    Article  Google Scholar 

  65. T. Witke, T. Schuelke, B. Schultrich, P. Siemroth, J. Vetter, Comparison of filtered high current pulsed arc deposition (Φ-HCA) with conventional vacuum arc methods. Surf. Coat. Technol. 126, 81–88 (2000)

    Article  Google Scholar 

  66. G.F. You, B.K. Tay, S.P. Lau, D.H.C. Chua, W.I. Milne, Carbon arc plasma transport through different off-plane double bend filters. Surf. Coat. Technol. 150, 50–56 (2002)

    Google Scholar 

  67. O. Zimmer, Vacuum arc deposition by using a Venetian blind particle filter. Surf. Coat. Technol. 200, 440–443 (2005)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, Germany

    Bernd Schultrich

Authors
  1. Bernd Schultrich
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

Copyright information

© 2018 Springer-Verlag GmbH Germany

About this chapter

Check for updates. Verify currency and authenticity via CrossMark

Cite this chapter

Schultrich, B. (2018). Vacuum Arc with Particle Filtering. In: Tetrahedrally Bonded Amorphous Carbon Films I. Springer Series in Materials Science, vol 263. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-55927-7_11

Download citation

Publish with us

Policies and ethics

Search

Navigation