Abstract
Over the last two and a half decades we have observed astonishing progress in the field of nanotechnology. This progress is largely due to the invention of Scanning Tunneling Microscope (STM) and Atomic Force Microscope (AFM) in the 1980s. Central to the operation of AFM and STM is a nanopositioning system that moves a sample or a probe, with extremely high precision, up to a fraction of an Angstrom, in certain applications. This note concentrates on the fundamental role of feedback, and the need for model-based control design methods in improving accuracy and speed of operation of nanopositioning systems.
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Moheimani, S.O.R. (2013). Control for High-Speed Nanopositioning. In: Baillieul, J., Samad, T. (eds) Encyclopedia of Systems and Control. Springer, London. https://doi.org/10.1007/978-1-4471-5102-9_184-1
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DOI: https://doi.org/10.1007/978-1-4471-5102-9_184-1
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Dynamics and Control of Active Microcantilevers- Published:
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DOI: https://doi.org/10.1007/978-1-4471-5102-9_184-2
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Control for High-Speed Nanopositioning- Published:
- 13 February 2014
DOI: https://doi.org/10.1007/978-1-4471-5102-9_184-1