Skip to main content
SpringerLink
Log in

Focused-Ion-Beam Chemical-Vapor-Deposition (FIB-CVD)

  • Living reference work entry
  • First Online:
Encyclopedia of Nanotechnology

Synonyms

Focused-ion-beam-induced deposition (FIB-ID)

Definition

Focused ion beam (FIB) can be used as a deposition tool for fabricating nanostructures. FIB chemical vapor deposition (FIB-CVD) uses ion energy to initiate and localize chemical vapor deposition (CVD) in a specific location by a direct-writing technique. When a local gas ambient is produced near a surface, the impact of energetic ions on that surface can induce chemical reaction. The ion-induced chemistry occurs in an adsorbed layer than in the gas above the surface.

FIB-CVD Process

In 1979, Seliger et al. reported Ga ion beams down to 100-nm diameter with current density in the focal spot of 1.5 A/cm2 [1]. In 1990, Wargner et al. demonstrated pillars and walls with high aspect ratios achieved using FIB-CVD [2]. In 2000, Matsui et al. demonstrated three-dimensional (3-D) nanostructure fabrication by FIB-CVD [3].

Matsui et al. used two commercially available FIB systems (SMI9200, SMI2050, SII NanoTechnology Inc., Tokyo,...

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution

Institutional subscriptions

References

  1. Seliger, R. L., Kubena, R. L., Olney, R. D., Ward, J. W., Wang, W.: High-resolution, ion-beam processes for microstructure fabrication. J. Vac. Sci. Technol. 16, 1610 (1979)

    Article  Google Scholar 

  2. Wargner, A., Levin, J. P., Mauer, J. L., Blauner, P. G., Kirch, S. J., Long, P.: X-ray mask repair with focused ion beams. J. Vac. Sci. Technol. B8, 1557 (1990)

    Article  Google Scholar 

  3. Matsui, S., Kaito, T., Fujita, J., Komuro, M., Kanda, K., Haruyama, Y.: Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition. J. Vac. Sci. Technol. B18, 3181 (2000)

    Article  Google Scholar 

  4. Kand, K., Igaki, J., Kato, Y., Kometani, R., Saikubo, A., Matsui, S.: Surface modification of PTFE by synchrotron radiation under the O2 gas atmosphere. Radiat. Phys. Chem. 75, 1850 (2006)

    Article  Google Scholar 

  5. Igaki, J., Saikubo, A., Kometani, R., et al.: Elementary analysis of diamond-like carbon film formed by focused-ion-beam chemical vapor deposition. Jpn. J. Appl. Phys. 46, 8003 (2007)

    Article  Google Scholar 

  6. Koops, H. W.: Characterization and application of materials grown by electron beam induced deposition. Jpn. J. Appl. Phys. 33, 7099 (1994)

    Article  Google Scholar 

  7. Hoshino, T., Watanabe, K., Kometani, R., et al.: Development of three-dimensional pattern-generating system for focused-ion-beam chemical-vapor-deposition. J. Vac. Sci. Technol. B21, 2732 (2003)

    Article  Google Scholar 

  8. Buks, E., Roukes, M. L.: Stiction, adhesion energy, and the Casimir effect in micromechanical systems. Phys. Rev. B63, 033402 (2001)

    Article  Google Scholar 

  9. Fujita, J., Ishida, M., Sakamoto, T., Ochiai, Y., Kaito, T., Matsui, S.: Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor deposition. J. Vac. Sci. Technol. B19, 2834 (2001)

    Article  Google Scholar 

  10. Ishida, M., Fujita, J., Ochiai, Y.: Density estimation for amorphous carbon nanopillars grown by focused ion beam assisted chemical vapor deposition. J. Vac. Sci. Technol. B20, 2784 (2002)

    Article  Google Scholar 

  11. Morita, T., Kometani, R., Watanabe, K., et al.: Free-space-wiring fabrication in nano-space by focused -ion-beam chemical vapor deposition. J. Vac. Sci. Technol. B21, 2737 (2003)

    Article  Google Scholar 

  12. Fujita, J., Ishida, M., Ochiai, Y., Ichihashi, T., Kaito, T., Matsui, S.: Focused ion beam -induced fabrication of tungsten structures. J. Vac. Sci. Technol. B20, 2686 (2002)

    Article  Google Scholar 

  13. Nakamatsu, K., Yamamoto, K., Hirayama, T., Matsui, S.: Fabrication of fine electron biprism filament by free-space-nanowiring technique of focused-ion-beam (FIB) + chemical vapor deposition (CVD) for accurate off-axis electron holography. Appl. Phys. Express 1, 117004 (2008)

    Article  Google Scholar 

  14. Vukusic, P., Roy Sambles, J.: Photonic structures in biology. Nature 424, 852 (2003)

    Article  Google Scholar 

  15. Watanabe, K., Hoshino, T., Kanda, K., Haruyama, Y., Matsui, S.: Brilliant blue observation from a morpho-butterfly-scale quasi-structure. Jpn. J. Appl. Phys. 44, L48 (2005)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo, Japan

    Shinji Matsui

Authors
  1. Shinji Matsui
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Shinji Matsui .

Editor information

Editors and Affiliations

  1. Biomimetics (NLB²), Ohio State University Nanoprobe Lab. for Bio- & Nanotechnology, Columbus, Ohio, USA

    Bharat Bhushan

Rights and permissions

Reprints and permissions

Copyright information

© 2015 Springer Science+Business Media Dordrecht

About this entry

Cite this entry

Matsui, S. (2015). Focused-Ion-Beam Chemical-Vapor-Deposition (FIB-CVD). In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6178-0_230-2

Download citation

  • DOI: https://doi.org/10.1007/978-94-007-6178-0_230-2

  • Received:

  • Accepted:

  • Published:

  • Publisher Name: Springer, Dordrecht

  • Online ISBN: 978-94-007-6178-0

  • eBook Packages: Springer Reference Chemistry and Mat. ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics

Publish with us

Policies and ethics

Search

Navigation