Definition
Ultrasonic vibration-assisted nanomachining is a mechanical machining-based nanofabrication approach using sharp cantilever tips, in which controlled ultrasonic vibration between the tip and the sample is utilized to regulate the dimension of the fabricated features and to improve the performance and speed of nanolithography.
Introduction
Ultrasonic vibration-assisted nanomachining is one of the tip-based nanolithography techniques that enable high-rate tunable nanofabrication on polymeric and metallic substrates. The sharp tip of the microcantilever provides capabilities for low-cost fabrication of polymeric or metallic nanostructures in the sub-50 nm regime and has potentials for fabricating 3D nanostructures. As a mechanical modification approach with an atomic force microscopy (AFM) tip, the ultrasonic vibration-assisted nanomachining overcomes many limitations from traditional...
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Dong, J. (2016). Ultrasonic Vibration-Assisted Nanomachining. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-9780-1_100921
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DOI: https://doi.org/10.1007/978-94-017-9780-1_100921
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