Abstract
Titanium nitride thin films were deposited on stainless steel (SS316L) targets by using a 4 kJ plasma focus device. The corresponding energy flux delivered to SS316L surface is estimated to be 2.69 × 1013 kev cm−3 ns−1. X-ray diffraction analysis reveals the formation of a nanocrystalline titanium nitride coating on the surface of targets. Thickness of the elements found on the surface of treated samples which are obtained by Rutherford backscattering spectrometry analysis (RBS) were (×1015 at/cm2) .45% Ti, 50% N and 5% Fe. Scanning electron microscopy was used to indicate changes in surface morphology. Existence of grains in different size confirms the formation of TiN crystals on the surface of targets.
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Omrani, M., Habibi, M. & Amrollahi, R. Coating of Titanium Nitride on Stainless Steel Targets by a 4 kJ Plasma Focus Device. J Fusion Energ 31, 401–404 (2012). https://doi.org/10.1007/s10894-011-9482-4
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DOI: https://doi.org/10.1007/s10894-011-9482-4