Abstract
Coatings in the Mo—Si—B—(N) system are obtained using the magnetron sputtering method. Control of nitrogen and silicon content in the coatings is carried out using various gaseous Ar + N2 mixtures and variation of the number of Si segments in the area of MoSiB target erosion. The structure of coatings is studied using methods of scanning and transmission electron microscopy, X-ray analysis, infrared and optical emission spectroscopy, and Raman spectroscopy. Mechanical and tribological properties of the coatings are determined using methods of nanoindentation, scratch-testing, and tribological testing at temperatures of 25, 500, and 700°C. The oxidation resistance of coatings is studied. It is established that coatings with maximum Si and N content possess the best properties: hardness of 32 GPa, elastic recovery of 66%, low friction coefficient at high temperatures, and heat resistance up to 1200°C.
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Original Russian Text © F.V. Kiryukhantsev-Korneev, A.V. Bondarev, D.V. Shtansky, E.A. Levashov, 2015, published in Fizikokhimiya Poverkhnosti i Zashchita Materialov, 2015, Vol. 51, No. 5, pp. 503–511.
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Kiryukhantsev-Korneev, P.V., Bondarev, A.V., Shtansky, D.V. et al. Structure and properties of nanocomposite Mo—Si—B—(N) coatings. Prot Met Phys Chem Surf 51, 794–802 (2015). https://doi.org/10.1134/S2070205115050160
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DOI: https://doi.org/10.1134/S2070205115050160