Abstract
Au/Zr bilayer films with inert-gas markers were produced by low energy (< 4 keV) implantation. Mass transport was measured during ion-beam mixing with 1 MeV Kr at several temperatures between 330 and 540K. Two distinct regimes of apparent Arrhenius behavior were found with activation enthalpies of 0.06 and 0.9 eV in the temperature range 330–440K and 460–540K, respectively. Microstructural changes during ion-beam mixing were studied in situ, in a high voltage electron microscope. Heterogeneous nucleation of an amorphous phase was observed during mixing. The results are compared with similar studies reported previously in Ni/Zr bilayer specimens.
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References
Fu-Rong Ding, R. S. Averback and H. Hahn, to be published.
Y.-T. Cheng, W. L. Johnson and M.-A. Nicolet, Appl. Phys. Lett. 47 (8), 800 (1985).
H. Hahn, R. S. Averback and S. J. Rothman, Phys. Rev. Β 33, 8825 (1986).
S. Matteson and M.-A. Nicolet, " Ion Mixing", Ann. Rev. Mat. Sci. 13, 339 (1983).
W. K. Chu, S. S. Lau, J. W. Mayer, H. Müller and K. N. Tu, Thin Solid Films, 25, 393 (1975)
W. K. Chu, H. Krautle, J. W. Mayer, H. Müller, M.-A. Nicolet and Κ. Ν. Tu, Appl. Phys. Lett. 25, 454 (1974).
Program developed by M. Schalit, R. S. Averback and L. J. Thompson.
G. B. Fedorov and E. A. Smirnov, Diffusion in Reactor Materials, (Atomizdat Publishers, Moscow, 1978 ), p. 28.
Zhong-Lie Wang, Nucl’. Instr. & Methods in Physics Research, B2, 784 (1984).
J. W. Mayer, B. Y. Tsaus, S. S. Lau and L. S. Hung, Nucl. Instr. & Methods, 182/183,1 (1981).
R. S. Averback, Nucl. Instr. & Methods in Physics Research, B15, 675 (1986).
Rudolf Sizmann, Journal of Nuclear Materials, 69 & 70, 386 (1968).
J. F. Ziegler, IBM-Research, Yorktown, New York, 10598, USA.
H. Nakajima, M. Koiwa, Y. Minomish and S. ono, Trans. Japan Inst. of Metals, 24, 655 (1983).
H. Hahn, R. S. Averback, Fu-Rong Ding, C. Loxton and J. Baker, Materials Science Forum Volumes, 15–18, (1987), pp. 511–516.
Y-T. Cheng, M. Van Rossum, M-A. Nicolet, and W. L. Johnson, Appl. Phys. Lett. 45(2), 185 (1984).
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Ding, FR., Okamoto, P.R. & Rehn, L.E. Ion-Beam Mixing and Amorphization in Au/Zr Bilayers. MRS Online Proceedings Library 100, 69 (1987). https://doi.org/10.1557/PROC-100-69
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DOI: https://doi.org/10.1557/PROC-100-69