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Three-Dimensional Micro- and Nanofabrication with Multiphoton Absorption

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Multiphoton absorption has become a powerful technique for the creation of three-dimensional micro- and nanostructures. Here we review some of our recent progress towards creating functional microdevices with multiphoton absorption. Specific thrusts of our research include development of new resins for multiphoton absorption polymerization, design of novel schemes for metal deposition, and post-fabrication ablation of polymeric structures.

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Acknowledgments

This work was supported by the National Science Foundation, Grants ECS-0088438 (JTF) and NIRT-0210533 (MJN). JTF is a Research Corporation Cottrell Scholar and a Camille Dreyfus Teacher-Scholar.

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Authors and Affiliations

  1. Eugene F. Merkert Chemistry Center, Boston College, Chestnut Hill, MA, 02467, U.S.A.

    Christopher N. LaFratta, Richard A. Farrer, Tommaso Baldacchini, Juliet Znovena, Daniel Lim, Anne-Cécile Pons, Josefina Pons, Kevin O'Malley, Zeynel Bayindir, Michael J. Naughton, Bahaa E. A. Saleh, Malvin C. Teich & John T. Fourkas

  2. Department of Physics, Boston College, Chestnut Hill, MA, 02467, U.S.A.

    Christopher N. LaFratta, Richard A. Farrer, Tommaso Baldacchini, Juliet Znovena, Daniel Lim, Anne-Cécile Pons, Josefina Pons, Kevin O'Malley, Zeynel Bayindir, Michael J. Naughton, Bahaa E. A. Saleh, Malvin C. Teich & John T. Fourkas

  3. Department of Electrical & Computer Engineering, Quantum Imaging Laboratory, Boston University, Boston, MA, 02215, U.S.A.

    Christopher N. LaFratta, Richard A. Farrer, Tommaso Baldacchini, Juliet Znovena, Daniel Lim, Anne-Cécile Pons, Josefina Pons, Kevin O'Malley, Zeynel Bayindir, Michael J. Naughton, Bahaa E. A. Saleh, Malvin C. Teich & John T. Fourkas

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  1. Christopher N. LaFratta
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  2. Richard A. Farrer
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  3. Tommaso Baldacchini
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  4. Juliet Znovena
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  5. Daniel Lim
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  6. Anne-Cécile Pons
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  7. Josefina Pons
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  8. Kevin O'Malley
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  9. Zeynel Bayindir
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  10. Michael J. Naughton
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  11. Bahaa E. A. Saleh
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  12. Malvin C. Teich
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  13. John T. Fourkas
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LaFratta, C.N., Farrer, R.A., Baldacchini, T. et al. Three-Dimensional Micro- and Nanofabrication with Multiphoton Absorption. MRS Online Proceedings Library 850, 19–24 (2004). https://doi.org/10.1557/PROC-850-MM4.5

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  • DOI: https://doi.org/10.1557/PROC-850-MM4.5

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