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Low-Cost Patterning of Ceramic Thin Films

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Electroceramic-Based MEMS

Part of the book series: Electronic Materials: Science and Technology ((EMST,volume 9))

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  1. Department of Chemical Engineering, Princeton University, Princeton, NJ, 08544-5263, USA

    C. R. Martin & I. A. Aksay

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  1. C. R. Martin
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  1. EPFL, Swiss Federal Institute of Technology, Switzerland

    Nava Setter

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Martin, C.R., Aksay, I.A. (2005). Low-Cost Patterning of Ceramic Thin Films. In: Setter, N. (eds) Electroceramic-Based MEMS. Electronic Materials: Science and Technology, vol 9. Springer, Boston, MA. https://doi.org/10.1007/0-387-23319-9_15

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