Abstract
The University of Arizona Imaging Technology Laboratory has processed several types of very large format (> 4K×4K pixel) charge coupled devices for low light level scientific applications. These back illuminated devices were produced from frontside die fabricated by or for Fairchild Imaging Systems, Semiconductor Technology Associates, the Jet Propulsion Laboratory, and Kodak. A Philips 7K×9K frontside device has also been processed using similar techniques. The backside sensors yield >90% quantum efficiency (QE). All devices show excellent charge transfer efficiency (CTE>0.999997) at operating temperatures (typically −100 °C). Devices specifically designed for low signal applications have been demonstrated with less than 4 electrons read noise.
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References
Lesser, M. P. and Vu, P., 2001, Processing of Back-Illuminated 4096x4096 Fairchild CCDs at the University of Arizona, Proc. SPIE 4306, p.196
Lesser, M. P., 1996, Back Illuminated CCD Processing at Steward Observatory, Recent Developments in Scientific Optical Imaging, M. B. Denton, R. E. Fields, and Q. S. Hanley, eds., Royal Society of Chemistry, pg.62.
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Lesser, Michael and Bredthauer, Richard, 2000, Development of a Back Illuminated 4096x4096 15-micron Pixel Scientific CCD, Further Developments in Scientific Optical Engineering, Proceedings of the International Conference on Scientific Imaging, Royal Society of Chemistry, p. 111
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Lesser, M. (2004). Very Large Format Back Illuminated CCDS. In: Amico, P., Beletic, J.W., Beletic, J.E. (eds) Scientific Detectors for Astronomy. Astrophysics and Space Science Library, vol 300. Springer, Dordrecht. https://doi.org/10.1007/1-4020-2527-0_15
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DOI: https://doi.org/10.1007/1-4020-2527-0_15
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