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Focused Ion Beam as a Scanning Probe: Methods and Applications

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Applied Scanning Probe Methods II

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Authors and Affiliations

  1. Polo Sant’Anna Valdera — CRIM Lab, Scuola Superiore Sant’Anna, Viale Rinaldo Piaggio, 34, 56025, Pontedera (PI), Italy

    Vittoria Raffa, Piero Castrataro, Arianna Menciassi & Paolo Dario

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  1. Vittoria Raffa
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  2. Piero Castrataro
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  3. Arianna Menciassi
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  4. Paolo Dario
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Editors and Affiliations

  1. Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM), The Ohio State University, 650 Ackerman Road, Suite 255, Columbus, OH, 43202-1107, USA

    Bharat Bhushan

  2. Center for Nanotechnology (CeNTech) and Institute of Physics, University of Münster, Gievenbecker Weg 11, 48149, Münster, Germany

    Harald Fuchs

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Raffa, V., Castrataro, P., Menciassi, A., Dario, P. (2006). Focused Ion Beam as a Scanning Probe: Methods and Applications. In: Bhushan, B., Fuchs, H. (eds) Applied Scanning Probe Methods II. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-27453-7_11

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