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Surface and depth analysis based on sputtering

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Sputtering by Particle Bombardment III

Part of the book series: Topics in Applied Physics ((TAP,volume 64))

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Wittmaack, K. (1991). Surface and depth analysis based on sputtering. In: Behrisch, R., Wittmaack, K. (eds) Sputtering by Particle Bombardment III. Topics in Applied Physics, vol 64. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540534288_18

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