Abstract
This chapter presents the most common fundamental transduction principles used in microsensors. Each section provides an overview of the theory and then gives an example of a sensor that uses the transduction principle being described. A classification of measurands is presented as well as the most common transduction techniques including piezoresistance, piezoelectricity, capacitive, resistive, tunneling, thermoelectricity, optical and radiation-based techniques, and electrochemical.
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References
Eaton WP, Smith JH (1997) Micromachined pressure sensors: review and recent developments. Smart Mater. Struct., 6:530–539
Garcia C, Zhukov A, Zhukova V, Ipatov M, Blanco JM, Gonzalez J (2005) Effect of tensile stresses on GMI of Co-rich amorphous microwires. IEEE Trans. Magnetics, 41 (10):3688–3690
Gardner JW (1994) Microsensors: Principles and Applications. Wiley, West Sussex, England
Han M, Liang DF, Deng LJ (2005) Review paper, sensors development using its unusual properties of Fe/Co-based amorphous soft magnetic wire. J. Mat. Sci., 40:5573–5580
Halfner E (1969) The piezoelectric crystal unit-definitions and methods of measurement. Proc. IEEE 57, No. 2
Horowitz S, Nishida T, Cattafesta L, Sheplak M (2006) Solid State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, SC, June 4, 2006
Humenyuk I, Torbiero B, Assie-Souleille S, Colin R, Dollat X, Franc B, Martinez A, Temple-Boyer P (2006) Development of pNH4-ISFETS microsensors for water analysis. Microelectronics J., 37:475–479
Janata J (2003) Electrochemical microsensors. Proc. IEEE, 91 (6):864–869
Ko S, Kim Y, Lee S, Choi S, Kim S (2003) Micromachined piezoelectric membrane acouostic device. Sensors and Actuators A, Physical, 103:130–134
Liu CH, Kenny TW (2001) A high-precision, wide-bandwidth micromachined tunneling accelerometer. J. MEMS, 10 (3):425–433
Moskovits M (2005) Surface-enhanced Raman spectroscopy–A brief retrospective. J. Raman Spectroscopy, 36 (6/7):485–496
Norton H (1982) Sensor and Analyzer Handbook. Prentice Hall, NJ, pp. 18–24
Ried R, Kim E, Hong D, Muller R (1993) piezoelectric microphone with on-chip CMOS circuits. J. MEMS, 993 (23):111–120
Royer M, Holmen J, Wurm M, Aadland O (1983) ZnO on Si integrated acoustic sensor. Sensors and Actuators, A: Physical, 4:357–362
Stuart DA, Haes AJ, Yonzon CR, Hicks EM, Van Duyne RP (2005) Biological applications of localised surface plasmonic phenomenae. IEE Proc.–Nanobiotechnol., 152(1):13–32
Sze SM (1994) Semiconductor Sensors. Wiley, New York
Exceptionally high Young’s modulus observed for individual carbon nanotubes”, Treacy, M.M.J. (NEC Res. Inst., Princeton, NJ, USA); Ebbesen, T.W.; Gibson, J.M., Nature, v 381, n 6584, 20 June 1996, p 678–680
Valentini L, Cantalini C, Armentano I, Kenny JM, Lozzi L, Santucci S (2004) Highly sensitive and selective sensors based on carbon nanotubes thin films for molecular detection. Diamond Relat. Mat., 13:1301–1305
White RM (1987) A sensor classification scheme. IEEE Trans. Ultrason. Ferroelec, Freq. Contr. UFFC- 34:124
Zribi A, Iorio L, Lewis D (2005) Oil-free stress impedance pressure sensor for harsh environments. IEEE. Vol 2005, p 1275–1277
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Fortin, J. (2009). Transduction Principles. In: Zribi, A., Fortin, J. (eds) Functional Thin Films and Nanostructures for Sensors. Integrated Analytical Systems. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-68609-7_2
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DOI: https://doi.org/10.1007/978-0-387-68609-7_2
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