Abstract
Besides its use in plasma etching, perfluorocyclobutane (c-C4F8) has potential applications as a gaseous dielectric, especially in gas mixtures (e. g., see Refs.1-3). Perfluorocyclobutane is also of environmental interest because it is a global warming gas.4 For these reasons, we have recently synthesized and assessed electron collision cross-section and electron transport-coefficient data for this gas.5 The results of this critical assessment are summarized and briefly discussed in this paper.
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Christophorou, L.G., Olthoff, J.K. (2001). Electron Interactions with c-C4F8 . In: Christophorou, L.G., Olthoff, J.K. (eds) Gaseous Dielectrics IX. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0583-9_8
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DOI: https://doi.org/10.1007/978-1-4615-0583-9_8
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