Abstract
The purpose of this chapter is to summarize and compare available information about the six major techniques for surface compositional analysis (SIMS, SNMS, ISS, RBS, AES, and XPS) in tabular form and in brief narratives. It is assumed that the reader is familiar with the principles of these techniques. Detailed information on the ion spectroscopies (SIMS, SNMS, ISS, and RBS) is presented in earlier chapters of this volume; information on the electron spectroscopies can be found in the references given below and in a forthcoming volume of this series. Acronyms and abbreviations used in this chapter are defined in Chapter 1 of this volume.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
R. G. Copperthwaite, Surf Interface Anal. 2, 17 (1980).
J. Cazau, Appl. Surf. Sci. 20,457 (1985).
C. G. Pantano and T. E. Madey, Appl. Surf Sci. 7, 115 (1981); T. E. Madey, in: Analytical Electron Microscopy-1987 (D. C. Joy, ed.), p. 345, San Francisco Press, San Francisco (1987).
H. W. Wemer and R. P. H. Garten, Rep. Prog. Phys. 47, 221 (1984).
C. J. Powell and M. P. Seah, J. Vac. Sci. Technol. A 8, 735 (1990).
A. I. Zagorenko and V. I. Zaporozchenko, Surf Interface Anal. 14,438 (1989).
J. T. Grant, P. Williams, J. Fine, and C. J. Powell, Surf Interface Anal. 13,46(1988).
S. Hofmann, Surf Interface Anal. 9, 3 (1986).
M. P. Seah, Surface. Interface Anal. 9, 85 (1986).
A. W. Czandema, Solar Energy Mater. 5,349 (1981).
C. J. Powell, in: Applied Electron Spectroscopy for Surface Analysis (H. Windawi and F. Ho, eds.), pp. 19–36, Wiley, New York (1982).
M. P. Seah and D. Briggs, in: Practical Surface Analysis, second edition, Vol. 1, Auger and X-Ray Photoelectron Spectroscopy (D. Briggs and M. P. Seah, eds.), p. 5, Wiley, New York (1990).
H. W. Wemer, in: Thin Film and Depth Profile Analysis (H. Oechsner, ed.), p. 5, Springer-Verlag, Berlin (1984).
A. Benninghoven, F. G. Rüdenauer, and H. W. Werner, Secondary Ion Mass Spectrometry, pp. 1022–1047, Wiley, New York (1987).
J. R. Bird and J. S. Williams, in: Ion Beams for Materials Analysis (J. R. Bird and. S. Williams, eds.), pp. 515–537, Academic Press, New York (1989).
I. V. Bletso, D. M. Hercules, D. van Leyen, and A. Benninghoven, Macromolecules 20, 407 (1987).
H. Hantsche, Scanning 11, 257 (1989).
C. J. Powell, Appl. Surf Sci. 1, 143 (1978).
C. J. Powell, Aust. J. Phys. 35,769 (1982).
D. Briggs, Surf Sci. 189/190, 801 (1987).
C. J. Powell, Surf Interface Anal. 11, 103 (1988).
M. Seah, Surf Interface Anal. 14, 407 (1989); Surf. Interface Anal. 16, 135 (1990).
W. H. Gries, Fresenius Z. Anal. Chem. 333,596 (1989).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1991 Springer Science+Business Media New York
About this chapter
Cite this chapter
Powell, C.J., Hercules, D.M., Czanderna, A.W. (1991). Comparisons of SIMS, SNMS, ISS, RBS, AES, and XPS Methods for Surface Compositional Analysis. In: Czanderna, A.W., Hercules, D.M. (eds) Ion Spectroscopies for Surface Analysis. Methods of Surface Characterization, vol 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3708-3_7
Download citation
DOI: https://doi.org/10.1007/978-1-4615-3708-3_7
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-6649-2
Online ISBN: 978-1-4615-3708-3
eBook Packages: Springer Book Archive