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Aging Processes in Diamond-Like Carbon and Carbon/Metal Films

  • Chapter
Diamond and Diamond-like Films and Coatings

Part of the book series: NATO ASI Series ((NSSB,volume 266))

Abstract

Thin films deposited by nonequilibrium processes, such as in low pressure plasmas, are sensitive to aging due to the presence of free radicals, dangling bonds, defects, voids, internal stress and other features. Generally, several aspects of film stability or aging can be considered:

  1. A:

    spontaneous aging — internal material property characterized by the driving force to acquire minimum system energy without any intermediate agent;

  2. B:

    environmental aging — reaction with the ambient atmosphere (not “deliberately severe”);

  3. C:

    accelerated aging — post deposition treatment (deliberately severe) using various thermal, chemical, radiative, mechanical and other agents.

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Author information

Authors and Affiliations

  1. “Groupe des Couches Minces” (GCM) and Department of Engineering Physics, Ecole Polytechnique, Box 6079, Station “A”, Montreal, Quebec, H3C 3A7, Canada

    Ludvik Martinu

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  1. Ludvik Martinu
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Editor information

Editors and Affiliations

  1. Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, 37831-6093, Oak Ridge, Tennessee, USA

    Robert E. Clausing

  2. Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, 37831-6118, Oak Ridge, Tennessee, USA

    Linda L. Horton

  3. Department of Chemical Engineering, Case Western Reserve University, 44106, Cleveland, Ohio, USA

    John C. Angus

  4. Fraunhofer Institut für Angewandte Festkörperphysik, Tullastrasse 72, D-7800, Freiburg, Germany

    Peter Koidl

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© 1991 Plenum Press, New York

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Martinu, L. (1991). Aging Processes in Diamond-Like Carbon and Carbon/Metal Films. In: Clausing, R.E., Horton, L.L., Angus, J.C., Koidl, P. (eds) Diamond and Diamond-like Films and Coatings. NATO ASI Series, vol 266. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5967-8_29

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  • DOI: https://doi.org/10.1007/978-1-4684-5967-8_29

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-5969-2

  • Online ISBN: 978-1-4684-5967-8

  • eBook Packages: Springer Book Archive

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