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Nanoindentation of Thin Films

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Nanoindentation

Part of the book series: Mechanical Engineering Series ((MES))

Abstract

One of the most popular applications of nanoindentation is the determination of the mechanical properties of thin films. In nanoindentation tests, the properties of the film may be measured without removing the film from the substrate as is done in other types of testing. The spatial distribution of properties, in both lateral and depth dimensions, may be measured, and a wide variety of films are amenable to the technique, from ion-implanted surfaces to optical coatings and polymer films Apart from testing films in-situ, nanoindentation techniques can also be used for films made as free-standing microbeams or membranes.1

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Authors and Affiliations

  1. CSIRO, Bradfield Road, West Lindfield, 2087, Lindfield, NSW, Australia

    Anthony C. Fischer-Cripps

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  1. Anthony C. Fischer-Cripps
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© 2004 Springer Science+Business Media New York

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Fischer-Cripps, A.C. (2004). Nanoindentation of Thin Films. In: Nanoindentation. Mechanical Engineering Series. Springer, New York, NY. https://doi.org/10.1007/978-1-4757-5943-3_8

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  • DOI: https://doi.org/10.1007/978-1-4757-5943-3_8

  • Publisher Name: Springer, New York, NY

  • Print ISBN: 978-1-4419-1962-5

  • Online ISBN: 978-1-4757-5943-3

  • eBook Packages: Springer Book Archive

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