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Limits to Nanofabrication

  • Chapter
The Physics of Micro/Nano-Fabrication

Part of the book series: Microdevices ((MDPF))

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Abstract

Devices can be made with decreasing linear dimensions until one of two limitations is reached, namely

  • Limitations imposed by the physical principles by which the device operates

  • Limitations imposed by our ability to fabricate the device to the required dimensions and tolerances

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Authors and Affiliations

  1. SRI International, Menlo Park, California, USA

    Ivor Brodie & Julius J. Muray

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  1. Ivor Brodie
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  2. Julius J. Muray
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Editors and Affiliations

  1. SRI International, Menlo Park, California, USA

    Ivor Brodie  & Julius J. Muray  & 

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© 1992 Springer Science+Business Media New York

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Brodie, I., Muray, J.J. (1992). Limits to Nanofabrication. In: Brodie, I., Muray, J.J. (eds) The Physics of Micro/Nano-Fabrication. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-6775-9_7

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  • DOI: https://doi.org/10.1007/978-1-4757-6775-9_7

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4419-3221-1

  • Online ISBN: 978-1-4757-6775-9

  • eBook Packages: Springer Book Archive

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