Abstract
Novel piezo-driven XYZ and XY microstages have been developed. The design, fabrication and evaluation of the two kinds of microstages are presented. One of the microstages is fabricated from a monolithic PZT plate. Using dicing, electroplating of nickel, photolithography and laser machining, stacked PZT actuators are formed in the PZT plate, also the structure of XYZ microstage with 16×15 mm2 are defined. This microstage has a capability of 6 degrees of freedom in motion. Using capacitive displacement sensor, precise motion control is demonstrated. However, it is difficult to form support spring with a low stiffness due to the difficulty in the structure formation of PZT. Another type of the microstage is hybrid of Si and PZT, a Si XY microstage structure is formed by deep reactive ion etching, and PZT stacked actuators are assembled in to the Si microstage. In order to amplify the displacements, Moonie amplification mechanism is chosen. The stage is supported by the Moonie mechanism and support springs. Over 80 µm of displacement is obtained at an application voltage of 70 V, also 18 times amplitude amplification is demonstrated.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Eleftheriou E, Bächtold P, Cherubini G, Dholakia A, Hagleitner C, Loeliger T, Pantazi A and Pozidis H (2003) A Nanotechnology-based Approach to Data Storage Proc. of the 29th VLDB Conference 3-7
Faizul MS, Ono T, Kawai Y and Esashi M (2008) A Si-PZT Hybrid XY-microstage utilizing an Actuator Amplification Mechanism Proc. of the Actuator 2008 75-78
Debeda H, Freyholf TV, Mohr J, Walrabe U and Wengelink J (1999) Development of minituarized piezoelectric actuators for optical applications realized using LIGA technology IEEE J. MEMS 8 :258-263
Sarajlic E, de Boer MJ, Jansen HV, Arnal N, Puech M, Krijnen G and Elwenspoek M (2005) Bulk micromachining technology for fabrication of two-level MEMS in standard silicon substrate Proc. of the TRANSDUCERS ’05 1404-1405
Takahashi T, Mita M, Fujita H and Toshiyoshi H (2006) A high fill-factor comb-driven XY-stage with topological layer switch architecture IEICE El. Ex 3 :197-202
Pantazi A, Lantz MA, Cherubini G, Pozidis H and Eleftheriou E (2004) A servomechanism for a micro-electromechanical-system-based scanning-probe data storage device Nanotechnology 15 :612–621
Golda DS and Culpepper ML (2008) Design of a six axis meso-scale nanopositioner driven by moving coil microactuators Proc. of Solid-state sensors, actuators, and Microsystems workshop 60-638 PZT Driven Micro XY Stage
Xu H, Ono T, Zhang DY and Esashi M (2006) Fabrication and characterizations of a monolithic PZT microstage Microsyst Technol 12 :883-890
Sasaki M, Bono F and Hane K (2008) Large displacement micro-xy-stage with paired moving plates Japs J. of Applied Physics 47 :3226-3231
Choi JJ, Park H, Kim KY and Jeon JU (2001) Electromagnetic micro X-Y stage with very thick Cu coil for probe-based mass data storage device Proc. SPIE 4334 :363-371
Ma HW, Yao SM, Wang LQ and Zhong Z (2006) Analysis of the displacement amplification ratio of bridge-type flexure hinge Sensors and Actuators A 132 :730-736
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2010 Springer-Verlag London Limited
About this chapter
Cite this chapter
Ono, T., Sabri, M., Esashi, M. (2010). PZT Driven Micro XY Stage. In: Higuchi, T., Suzumori, K., Tadokoro, S. (eds) Next-Generation Actuators Leading Breakthroughs. Springer, London. https://doi.org/10.1007/978-1-84882-991-6_6
Download citation
DOI: https://doi.org/10.1007/978-1-84882-991-6_6
Publisher Name: Springer, London
Print ISBN: 978-1-84882-990-9
Online ISBN: 978-1-84882-991-6
eBook Packages: EngineeringEngineering (R0)