Abstract
Interactions among a surface and a probing unit are not restricted on mechanical forces. This became evident already from the extensions of the atomic force microscope in the previous chapter. Strong interactions can also occur for long-range electrical and magnetic forces. This Chapter deals with the most common surface metrology methods based on electrical fields -the capacitive surface profiling- as well as magnetic fields -the profiling with eddy currents.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Sherwood, K.E., Crookall, J.K.: Surface finish assessment by electrical technique. Proc. Inst. Mech. Eng. E (London). 182(3K), 344–349 (1967/1968)
Brecker, H.N., Fromson, R.N., Shum, L.Y.: A capacitance based surface texture measuring system. Ann. CIRP. 25(1), 375–377 (1977)
Lieberman, A.G., Vorburger, T.V., Giauque, C.H.W., Risko, D.G., Resnick, R., Rose, J.: Capacitance versus stylus measurement of surface roughness. Surf. Topogr. 1, 315–330 (1988)
Williams, R.E., Rajurkar, K.P., Bishu, R. R.: Experimental comparison of a stylus based and a capacitance based surface roughness measurement system for different micro surface contour, Society of Manufacturing Engineers IQ990–255, 1–13 (1990)
Chang, H.-K., Kim, J.-H., Kim, I.H., Jang, D.Y., Han, D.C.: In-process surface roughness prediction using displacement signals from spindle motion. Int. J. Mach. Tools Manuf. 47(6), 1021–1026 (2007)
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2019 Springer Nature Switzerland AG
About this chapter
Cite this chapter
Quinten, M. (2019). Capacitive and Inductive Surface Metrology. In: A Practical Guide to Surface Metrology. Springer Series in Measurement Science and Technology. Springer, Cham. https://doi.org/10.1007/978-3-030-29454-0_3
Download citation
DOI: https://doi.org/10.1007/978-3-030-29454-0_3
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-29453-3
Online ISBN: 978-3-030-29454-0
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)