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Design of Deterministic Model for Compensation of Acceleration Sensitivity in MEMS Gyroscope

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Mechatronics 2019: Recent Advances Towards Industry 4.0 (MECHATRONICS 2019)

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Abstract

Single mass MEMS gyroscopes are sensitive to different operating conditions, such as temperature or acceleration of the sensor body. This paper deals with the design of a model that is able to compensate for the propagation of sensor body acceleration in gyroscope drive direction to gyroscope measurement. A new compensation model is proposed, subsequently, parameters for this model are defined and finally, the fit of the model is compared to measured data. With the compensator applied, the influence of acceleration on the gyroscope measurement is reduced.

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Correspondence to Tomas Spacil .

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Spacil, T., Rajchl, M., Bastl, M., Najman, J., Appel, M. (2020). Design of Deterministic Model for Compensation of Acceleration Sensitivity in MEMS Gyroscope. In: Szewczyk, R., Krejsa, J., Nowicki, M., Ostaszewska-Liżewska, A. (eds) Mechatronics 2019: Recent Advances Towards Industry 4.0. MECHATRONICS 2019. Advances in Intelligent Systems and Computing, vol 1044. Springer, Cham. https://doi.org/10.1007/978-3-030-29993-4_35

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