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Special Requirements for μ-XRF

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Laboratory Micro-X-Ray Fluorescence Spectroscopy

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 55))

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Abstract

This chapter starts with a short overview for the development of instrumentation for position sensitive X-ray analysis. Then the different possibilities for a position sensitive measurement are introduced and compared in regards to their analytical results but also to their measurement effort. In a next part the commercially available instruments are compared in regards to their main applications and their analytical performance. Finally, the different measurement modes for μ-XRF instruments i.e. single and multiple point measurements as well as one-, two- or even three-dimensional distribution analysis are introduced and the possibilities for the evaluation of two-dimensional analysis are discussed based on measurements of one sample.

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  1. Eggersdorf, Germany

    Michael Haschke

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  1. Michael Haschke
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Haschke, M. (2014). Special Requirements for μ-XRF. In: Laboratory Micro-X-Ray Fluorescence Spectroscopy. Springer Series in Surface Sciences, vol 55. Springer, Cham. https://doi.org/10.1007/978-3-319-04864-2_3

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