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Position Sensors

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Design, Modeling and Control of Nanopositioning Systems

Part of the book series: Advances in Industrial Control ((AIC))

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Abstract

Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines.

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Notes

  1. 1.

    In a two-varying-element bridge circuit, the nonlinearity due to \(\Delta R/2\) in Eq. (5.34) is 0.5 % nonlinearity per percent of strain (Kester 2002). Since the maximum strain of a piezoelectric actuator is 0.1 %, the maximum nonlinearity is only 0.05 % and can be neglected. If this magnitude of nonlinearity is not tolerable, compensating circuits are available (Kester 2002)

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Authors and Affiliations

  1. School of Engineering and Computer Science, University of Newcastle, Callaghan, NSW, Australia

    Andrew J. Fleming

  2. Mechanical Engineering, University of Nevada, Reno, Reno, NV, USA

    Kam K. Leang

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  1. Andrew J. Fleming
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Correspondence to Andrew J. Fleming .

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Fleming, A.J., Leang, K.K. (2014). Position Sensors. In: Design, Modeling and Control of Nanopositioning Systems. Advances in Industrial Control. Springer, Cham. https://doi.org/10.1007/978-3-319-06617-2_5

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  • DOI: https://doi.org/10.1007/978-3-319-06617-2_5

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