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Design Optimization of Silicon-on-Insulator Slot-Waveguides for Electro-optical Modulators and Biosensors

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Photoptics 2015

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 181))

Abstract

An approach for design optimization of the geometrical parameters of silicon-on-insulator slot-waveguides for electro-optical modulators and biosensors is presented. Theoretical investigations of field confinement factors and effective nonlinear areas for different slot-waveguide structures are critically analyzed and thoroughly calculated. With our simulation results we explain the high efficiency of electro-optical modulators and the enhanced sensitivity of biosensors compared to strip-waveguides. The influence on the effective refractive index, field confinement factor, and effective nonlinear area of the slot width and the silicon rail width were investigated.

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Acknowledgements

The authors would like to thank the German Federal Ministry of Education and Research (BMBF) for the financial support under contract no. 03FH086PX2, the University of Applied Sciences Wildau (THWi), Germany, and the Ministry of Science, Technology and Culture of the federal state Brandenburg, Germany, for financial support. The authors would also like to thank P. Prosposito, F. De Matteis, and R. De Angelis from the University of Rome Tor Vergata, Italy, S. Meister, S. Kupijai, and A. Al-Saadi from the Technical University Berlin, Germany, and L. Zimmermann, D. Knoll, D. Stolarek, J. Katzer, S. Lischke, H. Silz, B. Tillack, and W. Mehr from the Institute of High-Performance Microelectronics (IHP), Germany, for their encouragement and support in the framework of the Joint-Lab IHP-THWi.

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Authors and Affiliations

  1. Faculty of Engineering and Natural Sciences, University of Applied Sciences Wildau, Wildau, 15745, Germany

    Patrick Steglich, Claus Villringer, Silvio Pulwer & Sigurd Schrader

  2. Department of Industrial Engineering, University of Rome “Tor Vergata”, 00133, Rome, Italy

    Patrick Steglich & Mauro Casalboni

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  1. Patrick Steglich
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  2. Claus Villringer
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  5. Sigurd Schrader
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Correspondence to Patrick Steglich .

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Editors and Affiliations

  1. Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa, Caparica, Portugal

    Paulo Ribeiro

  2. Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa, Caparica, Portugal

    Maria Raposo

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Steglich, P., Villringer, C., Pulwer, S., Casalboni, M., Schrader, S. (2016). Design Optimization of Silicon-on-Insulator Slot-Waveguides for Electro-optical Modulators and Biosensors. In: Ribeiro, P., Raposo, M. (eds) Photoptics 2015. Springer Proceedings in Physics, vol 181. Springer, Cham. https://doi.org/10.1007/978-3-319-30137-2_11

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